Stephen Biellak

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-pass imaging using image sensors with variably biased channel...
- Patent number 10,923,526
- Issue date Feb 16, 2021
- KLA Corporation
- Tzi-Cheng Lai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image sensors with grounded or otherwise biased channel-stop contacts
- Patent number 10,903,258
- Issue date Jan 26, 2021
- KLA Corporation
- Tzi-Cheng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spread-spectrum clock-signal adjustment for image sensors
- Patent number 10,734,438
- Issue date Aug 4, 2020
- KLA Corporation
- Tzi-Cheng Lai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Radiation-induced false count mitigation and detector cooling
- Patent number 10,690,599
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 10,488,348
- Issue date Nov 26, 2019
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Dark-field inspection using a low-noise sensor
- Patent number 10,462,391
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
System and method for reducing radiation-induced false counts in an...
- Patent number 10,241,217
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 9,915,622
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for reducing radiation-induced false counts in an...
- Patent number 9,841,512
- Issue date Dec 12, 2017
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Laser with integrated multi line or scanning beam capability
- Patent number 9,678,350
- Issue date Jun 13, 2017
- KLA-Tencor Corporation
- Christian Wolters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image intensifier tube design for aberration correction and ion dam...
- Patent number 9,666,419
- Issue date May 30, 2017
- KLA-Tencor Corporation
- Ximan Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of selected defects in relatively noisy inspection data
- Patent number 9,646,379
- Issue date May 9, 2017
- KLA-Tencor Corp.
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High resolution high quantum efficiency electron bombarded CCD or C...
- Patent number 9,460,886
- Issue date Oct 4, 2016
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection with multi-spot illumination and multiple channels
- Patent number 9,404,873
- Issue date Aug 2, 2016
- KLA-Tencor Corp.
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Detection of selected defects in relatively noisy inspection data
- Patent number 9,355,440
- Issue date May 31, 2016
- KLA-Tencor Corp.
- Haiguang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 9,279,774
- Issue date Mar 8, 2016
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Multi-spot defect inspection system
- Patent number 9,182,358
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection system detector
- Patent number 9,086,389
- Issue date Jul 21, 2015
- KLA-Tencor Corporation
- Daniel Ivanov Kavaldjiev
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Photomultiplier tube optimized for surface inspection in the ultrav...
- Patent number 8,629,384
- Issue date Jan 14, 2014
- KLA-Tencor Corporation
- Stephen Biellak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for inspecting specimens including specimens th...
- Patent number 8,582,094
- Issue date Nov 12, 2013
- KLA-Tencor Technologies Corp.
- David Shortt
- G01 - MEASURING TESTING
Information Patent Grant
Segmented polarizer for optimizing performance of a surface inspect...
- Patent number 8,520,208
- Issue date Aug 27, 2013
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Fast laser power control with improved reliability for surface insp...
- Patent number 8,294,887
- Issue date Oct 23, 2012
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods for inspecting and/or classifying a wafer
- Patent number 8,269,960
- Issue date Sep 18, 2012
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Segmented polarizer for optimizing performance of a surface inspect...
- Patent number 8,169,613
- Issue date May 1, 2012
- KLA-Tencor Corp.
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for determining two or more characteristics of...
- Patent number 7,912,658
- Issue date Mar 22, 2011
- KLA-Tencor Corp.
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Defect detection
- Patent number 7,796,805
- Issue date Sep 14, 2010
- KLA-Tencor Corporation
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Systems configured to inspect a wafer
- Patent number 7,746,459
- Issue date Jun 29, 2010
- KLA-Tencor Technologies Corp.
- Azmi Kadkly
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Spread-Spectrum Clock-Signal Adjustment for Image Sensors
- Publication number 20190288019
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Tzi-Cheng Lai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Multi-Pass Imaging Using Image Sensors with Variably Biased Channel...
- Publication number 20190288028
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Tzi-Cheng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Sensors with Grounded or Otherwise Biased Channel-Stop Contacts
- Publication number 20190109163
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Tzi-Cheng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Inspection
- Publication number 20180164228
- Publication date Jun 14, 2018
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Reducing Radiation-Induced False Counts in an...
- Publication number 20180045837
- Publication date Feb 15, 2018
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
Dark-Field Inspection Using A Low-Noise Sensor
- Publication number 20170048467
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Reducing Radiation-Induced False Counts in an...
- Publication number 20160334516
- Publication date Nov 17, 2016
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
High Resolution High Quantum Efficiency Electron Bombarded CCD Or C...
- Publication number 20160027605
- Publication date Jan 28, 2016
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20150369753
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Defect Inspection System
- Publication number 20140268118
- Publication date Sep 18, 2014
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Sample Inspection System Detector
- Publication number 20140118730
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Daniel Ivanov Kavaldjiev
- G01 - MEASURING TESTING
Information Patent Application
Image Intensifier Tube Design for Aberration Correction and Ion Dam...
- Publication number 20140063502
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- Ximan Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser with Integrated Multi Line or Scanning Beam Capability
- Publication number 20130250385
- Publication date Sep 26, 2013
- KLA-Tencor Corporation
- Christian Wolters
- G02 - OPTICS
Information Patent Application
Wafer Inspection with Multi-Spot Illumination and Multiple Channels
- Publication number 20130235374
- Publication date Sep 12, 2013
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20130016346
- Publication date Jan 17, 2013
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER
- Publication number 20100060888
- Publication date Mar 11, 2010
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF...
- Publication number 20090299655
- Publication date Dec 3, 2009
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS CONFIGURED TO INSPECT A WAFER
- Publication number 20090040525
- Publication date Feb 12, 2009
- Azmi Kadkly
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for inspection of a wafer
- Publication number 20070081151
- Publication date Apr 12, 2007
- David Shortt
- G01 - MEASURING TESTING
Information Patent Application
Enhanced simultaneous multi-spot inspection and imaging
- Publication number 20060197946
- Publication date Sep 7, 2006
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for a wafer inspection system using multiple an...
- Publication number 20060007435
- Publication date Jan 12, 2006
- Steve Biellak
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for simultaneous or sequential multi-perspectiv...
- Publication number 20030011760
- Publication date Jan 16, 2003
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
System and methods for inspection of transparent mask substrates
- Publication number 20020196433
- Publication date Dec 26, 2002
- Steve Biellak
- G01 - MEASURING TESTING
Information Patent Application
Systems and methods for a wafer inspection system using multiple an...
- Publication number 20010052975
- Publication date Dec 20, 2001
- Steve Biellak
- G01 - MEASURING TESTING

Stephen Biellak

Person

Patents Grantslast 30 patents

Multi-pass imaging using image sensors with variably biased channel...

Image sensors with grounded or otherwise biased channel-stop contacts

Spread-spectrum clock-signal adjustment for image sensors

Radiation-induced false count mitigation and detector cooling

Wafer inspection

Dark-field inspection using a low-noise sensor

System and method for reducing radiation-induced false counts in an...

Wafer inspection

TDI sensor in a darkfield system

System and method for reducing radiation-induced false counts in an...

Laser with integrated multi line or scanning beam capability

Image intensifier tube design for aberration correction and ion dam...

Detection of selected defects in relatively noisy inspection data

High resolution high quantum efficiency electron bombarded CCD or C...

Wafer inspection with multi-spot illumination and multiple channels

Detection of selected defects in relatively noisy inspection data

Wafer inspection

Illumination energy management in surface inspection

Multi-spot defect inspection system

Sample inspection system detector

Illumination energy management in surface inspection

Photomultiplier tube optimized for surface inspection in the ultrav...

Systems and methods for inspecting specimens including specimens th...

Segmented polarizer for optimizing performance of a surface inspect...

Fast laser power control with improved reliability for surface insp...

Computer-implemented methods for inspecting and/or classifying a wafer

Segmented polarizer for optimizing performance of a surface inspect...

Systems and methods for determining two or more characteristics of...

Defect detection

Systems configured to inspect a wafer

Patents Applicationslast 30 patents

Spread-Spectrum Clock-Signal Adjustment for Image Sensors

Multi-Pass Imaging Using Image Sensors with Variably Biased Channel...

Image Sensors with Grounded or Otherwise Biased Channel-Stop Contacts

Wafer Inspection

System and Method for Reducing Radiation-Induced False Counts in an...

Dark-Field Inspection Using A Low-Noise Sensor

System and Method for Reducing Radiation-Induced False Counts in an...

TDI Sensor in a Darkfield System

High Resolution High Quantum Efficiency Electron Bombarded CCD Or C...

Wafer Inspection

Illumination Energy Management in Surface Inspection

Multi-Spot Defect Inspection System

Illumination Energy Management in Surface Inspection

Sample Inspection System Detector

Image Intensifier Tube Design for Aberration Correction and Ion Dam...

Laser with Integrated Multi Line or Scanning Beam Capability

Wafer Inspection with Multi-Spot Illumination and Multiple Channels

Wafer Inspection

COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER

SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF...

SYSTEMS CONFIGURED TO INSPECT A WAFER

Methods and systems for inspection of a wafer

Enhanced simultaneous multi-spot inspection and imaging

Systems and methods for a wafer inspection system using multiple an...

Systems and methods for simultaneous or sequential multi-perspectiv...

System and methods for inspection of transparent mask substrates

Systems and methods for a wafer inspection system using multiple an...