Stephen C. Schlegel

Person

  • Dundee, OR, US

Patents Applicationslast 30 patents

  • Information Patent Application

    Multistep immersion of wafer into liquid bath

    • Publication number 20080149489
    • Publication date Jun 26, 2008
    • Novellus Systems, Inc.
    • Seshasayee Varadarajan
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR