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Stephen C. Schulz
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Gilbert, AZ, US
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last 30 patents
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Patent Grant
Low amplitude, high speed polisher and method
Patent number
6,913,528
Issue date
Jul 5, 2005
SpeedFam-IPEC Corporation
Stephen C. Schulz
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Low amplitude, high speed polisher and method
Publication number
20020132561
Publication date
Sep 19, 2002
SpeedFam-IPEC Corporation
Stephen C. Schulz
B24 - GRINDING POLISHING
Information
Patent Application
Abrasive free polishing in copper damascene applications
Publication number
20020098784
Publication date
Jul 25, 2002
Saket Chadda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...