Stephen Duan-Fu Hsu

Person

Freemont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for decomposing semiconductor device patterns...
- Patent number 7,549,140
- Issue date Jun 16, 2009
- ASML Masktools B.V.
- Doug Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for improved lithographic patterning utilizing optimized ill...
- Patent number 7,523,438
- Issue date Apr 21, 2009
- ASML Masktools B.V.
- Michael Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for performing transmission tuning of a mask pattern to impr...
- Patent number 7,514,183
- Issue date Apr 7, 2009
- ASML Masktools B.V.
- Stephen D. Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for improved lithographic patterning utilizing multiple cohe...
- Patent number 6,951,701
- Issue date Oct 4, 2005
- ASML Masktools B.V.
- Michael Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for performing rule-based gate shrink utilizin...
- Patent number 6,915,505
- Issue date Jul 5, 2005
- ASML Masktools B.V.
- Stephen D. Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for decomposing semiconductor device patterns...
- Patent number 6,851,103
- Issue date Feb 1, 2005
- ASML Masktools, B.V.
- Doug Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for minimizing optical proximity effects
- Patent number 6,519,760
- Issue date Feb 11, 2003
- ASML Masktools, B.V.
- Xuelong Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Row spacing tool
- Patent number 5,217,272
- Issue date Jun 8, 1993
- Stephen D. Hsu
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...

Patents Applicationslast 30 patents

Information Patent Application
Orientation dependent shielding for use with dipole illumination te...
- Publication number 20070214448
- Publication date Sep 13, 2007
- ASML MASKTOOLS B.V.
- Stephen Duan-Fu Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for providing optical proximity features to a...
- Publication number 20070162889
- Publication date Jul 12, 2007
- ASML MASKTOOLS B.V.
- Douglas Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for performing transmission tuning of a mask pattern to impr...
- Publication number 20050196682
- Publication date Sep 8, 2005
- Stephen D. Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for improved lithographic patterning utilizing multiple cohe...
- Publication number 20050186491
- Publication date Aug 25, 2005
- ASML MASKTOOLS B.V.
- Michael Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for decomposing semiconductor device patterns...
- Publication number 20050125765
- Publication date Jun 9, 2005
- ASML MASKTOOLS, B.V.
- Doug Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Orientation dependent shielding for use with dipole illumination te...
- Publication number 20050102648
- Publication date May 12, 2005
- Stephen Duan-Fu Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for providing optical proximity features to a...
- Publication number 20040209170
- Publication date Oct 21, 2004
- Douglas Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for decomposing semiconductor device patterns...
- Publication number 20040010770
- Publication date Jan 15, 2004
- Doug Van Den Broeke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for performing rule-based gate shrink utilizin...
- Publication number 20040003368
- Publication date Jan 1, 2004
- Stephen D. Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for improved lithographic patterning utilizing multiple cohe...
- Publication number 20030073013
- Publication date Apr 17, 2003
- Michael Hsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for minimizing optical proximity effects
- Publication number 20020152451
- Publication date Oct 17, 2002
- Xuelong Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Stephen Duan-Fu Hsu

Person

Patents Grantslast 30 patents

Method and apparatus for decomposing semiconductor device patterns...

Method for improved lithographic patterning utilizing optimized ill...

Method for performing transmission tuning of a mask pattern to impr...

Method for improved lithographic patterning utilizing multiple cohe...

Method and apparatus for performing rule-based gate shrink utilizin...

Method and apparatus for decomposing semiconductor device patterns...

Method and apparatus for minimizing optical proximity effects

Row spacing tool

Patents Applicationslast 30 patents

Orientation dependent shielding for use with dipole illumination te...

Method and apparatus for providing optical proximity features to a...

Method for performing transmission tuning of a mask pattern to impr...

Method for improved lithographic patterning utilizing multiple cohe...

Method and apparatus for decomposing semiconductor device patterns...

Orientation dependent shielding for use with dipole illumination te...

Method and apparatus for providing optical proximity features to a...

Method and apparatus for decomposing semiconductor device patterns...

Method and apparatus for performing rule-based gate shrink utilizin...

Method for improved lithographic patterning utilizing multiple cohe...

Method and apparatus for minimizing optical proximity effects