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Stephen E. Savas
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Taoyuan, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Fast etching system and process
Patent number
6,838,387
Issue date
Jan 4, 2005
John Zajac
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for photoresist strip and residue treatment in...
Patent number
6,805,139
Issue date
Oct 19, 2004
Mattson Technology, Inc.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic clamp for holding workpieces with irregular surfaces
Patent number
6,501,636
Issue date
Dec 31, 2002
Stephen Edward Savas
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
Systems and Methods for Photoresist Strip and Residue Treatment in...
Publication number
20070193602
Publication date
Aug 23, 2007
Stephen E. Savas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and Methods for Photoresist Strip and Residue Treatment in...
Publication number
20070186953
Publication date
Aug 16, 2007
Stephen E. Savas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Etching Apparatus and Process with Thickness and Uniformity Control
Publication number
20060191637
Publication date
Aug 31, 2006
John Zajac
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Systems and methods for photoresist strip and residue treatment in...
Publication number
20050079717
Publication date
Apr 14, 2005
Stephen E. Savas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Systems and methods for photoresist strip and residue treatment in...
Publication number
20050022839
Publication date
Feb 3, 2005
Stephen E. Savas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY