Stephen Edward Savas

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma non-uniformity detection
- Patent number 12,027,351
- Issue date Jul 2, 2024
- COMET Technologies USA, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable mode plasma chamber utilizing tunable plasma potential
- Patent number 12,002,652
- Issue date Jun 4, 2024
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sector shunts for plasma-based wafer processing systems
- Patent number 11,887,820
- Issue date Jan 30, 2024
- COMET Technologies USA, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
- Patent number 11,848,204
- Issue date Dec 19, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductive broad-band sensors for electromagnetic waves
- Patent number 11,830,708
- Issue date Nov 28, 2023
- COMET Technologies USA, Inc.
- Stephen E. Savas
- G01 - MEASURING TESTING
Information Patent Grant
Fast arc detecting match network
- Patent number 11,670,488
- Issue date Jun 6, 2023
- COMET Technologies USA, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsing control match network
- Patent number 11,605,527
- Issue date Mar 14, 2023
- COMET Technologies USA, Inc.
- Alexandre De Chambrier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity control for radio frequency plasma processing systems
- Patent number 11,521,832
- Issue date Dec 6, 2022
- COMET Technologies USA, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
- Patent number 11,348,784
- Issue date May 31, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for workpiece processing using neutral atom beams
- Patent number 11,251,075
- Issue date Feb 15, 2022
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable mode plasma chamber utilizing tunable plasma potential
- Patent number 11,189,464
- Issue date Nov 30, 2021
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for tuning plasma potential using variable mode plasma chamber
- Patent number 11,049,692
- Issue date Jun 29, 2021
- Mattson Technology, Inc.
- Stephen E. Savas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for surface preparation prior to epitaxial dep...
- Patent number 10,544,519
- Issue date Jan 28, 2020
- Aixtron SE
- Stephen Edward Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods for forming thin protective and optical layers on substrates
- Patent number 10,526,708
- Issue date Jan 7, 2020
- Aixtron SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust manifold in a CVD reactor
- Patent number 10,294,562
- Issue date May 21, 2019
- Aixtron SE
- Carl Galewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating units for processing a substrate
- Patent number 10,049,859
- Issue date Aug 14, 2018
- Aixtron SE
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source of an ion implanter
- Patent number 9,852,887
- Issue date Dec 26, 2017
- Advanced Ion Beam Technology, Inc.
- Stephen Edward Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing a multi-layer moisture barrier on electronic...
- Patent number 9,831,466
- Issue date Nov 28, 2017
- Aixtron SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for distributing RF power to a plasma source
- Patent number 9,721,759
- Issue date Aug 1, 2017
- Aixtron SE
- Richard Keith Karlquist
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma-based material modification using a plasma source with magne...
- Patent number 9,653,253
- Issue date May 16, 2017
- Advanced Ion Beam Technology, Inc.
- William Divergilio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for plasma processing
- Patent number 9,443,702
- Issue date Sep 13, 2016
- Aixtron SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for dielectric deposition
- Patent number 9,359,674
- Issue date Jun 7, 2016
- Aixtron, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for deposition of high-performance coatings and encapsulated...
- Patent number 9,299,956
- Issue date Mar 29, 2016
- Aixtron, Inc.
- Stephen E. Savas
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Advanced multi-workpiece processing chamber
- Patent number 9,184,072
- Issue date Nov 10, 2015
- Mattson Technology, Inc.
- Daniel J. Devine
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods for plasma processing
- Patent number 9,096,932
- Issue date Aug 4, 2015
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma processing
- Patent number 9,096,933
- Issue date Aug 4, 2015
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for dielectric deposition
- Patent number 8,765,232
- Issue date Jul 1, 2014
- Plasmasi, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for plasma processing
- Patent number 8,697,197
- Issue date Apr 15, 2014
- Plasmasi, Inc.
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slotted electrostatic shield modification for improved etch and CVD...
- Patent number 8,413,604
- Issue date Apr 9, 2013
- Mattson Technology, Inc.
- Rene George
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for growing thin oxide films on silicon while...
- Patent number 8,236,706
- Issue date Aug 7, 2012
- Mattson Technology, Inc.
- Bruce W. Peuse
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
- Publication number 20240297019
- Publication date Sep 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVE BROAD-BAND SENSORS FOR ELECTROMAGNETIC WAVES
- Publication number 20240145221
- Publication date May 2, 2024
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
- Publication number 20240071754
- Publication date Feb 29, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Measuring Pedestal Voltage Uniformity in P...
- Publication number 20230386780
- Publication date Nov 30, 2023
- Stephen Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST ARC DETECTING MATCH NETWORK
- Publication number 20230260755
- Publication date Aug 17, 2023
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
- Publication number 20220310359
- Publication date Sep 29, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
- Publication number 20220165614
- Publication date May 26, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE MODE PLASMA CHAMBER UTILIZING TUNABLE PLASMA POTENTIAL
- Publication number 20220084792
- Publication date Mar 17, 2022
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSING CONTROL MATCH NETWORK AND GENERATOR
- Publication number 20210225613
- Publication date Jul 22, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA NON-UNIFORMITY DETECTION
- Publication number 20210217587
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- G01 - MEASURING TESTING
Information Patent Application
UNIFORMITY CONTROL FOR RADIO FREQUENCY PLASMA PROCESSING SYSTEMS
- Publication number 20210217589
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECTOR SHUNTS FOR PLASMA-BASED WAFER PROCESSING SYSTEMS
- Publication number 20210217593
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AZIMUTHAL SENSOR ARRAY FOR RADIO FREQUENCY PLASMA-BASED WAFER PROCE...
- Publication number 20210217588
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- G01 - MEASURING TESTING
Information Patent Application
FAST ARC DETECTING MATCH NETWORK
- Publication number 20210217590
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BROAD-BAND SENSORS FOR ELECTROMAGNETIC WAVES
- Publication number 20210217595
- Publication date Jul 15, 2021
- COMET TECHNOLOGIES USA, INC.
- STEPHEN E. SAVAS
- G01 - MEASURING TESTING
Information Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
- Publication number 20210050213
- Publication date Feb 18, 2021
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE MODE PLASMA CHAMBER UTILIZING TUNABLE PLASMA POTENTIAL
- Publication number 20210020411
- Publication date Jan 21, 2021
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR TUNING PLASMA POTENTIAL USING VARIABLE MODE PLASMA CHAMBER
- Publication number 20210020404
- Publication date Jan 21, 2021
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Shield for Inductive Plasma Sources
- Publication number 20200227239
- Publication date Jul 16, 2020
- Mattson Technology, Inc.
- Stephen Edward Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems And Methods For Workpiece Processing Using Neutral Atom Beams
- Publication number 20200043775
- Publication date Feb 6, 2020
- Mattson Technology, Inc.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SURFACE PREPARATION PRIOR TO EPITAXIAL DEP...
- Publication number 20190062947
- Publication date Feb 28, 2019
- AIXTRON SE
- Stephen Edward Savas
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS ON SUBSTRATES
- Publication number 20180202046
- Publication date Jul 19, 2018
- AIXTRON SE
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST MANIFOLD IN A CVD REACTOR
- Publication number 20170283946
- Publication date Oct 5, 2017
- AIXTRON SE
- Carl Galewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS...
- Publication number 20160289837
- Publication date Oct 6, 2016
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITION OF HIGH-PERFORMANCE COATINGS AND ENCAPSULATED...
- Publication number 20160111684
- Publication date Apr 21, 2016
- PlasmaSi, Inc.
- Stephen E. SAVAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PLASMA PROCESSING
- Publication number 20150270109
- Publication date Sep 24, 2015
- Aixtron, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-BASED MATERIAL MODIFICATION USING A PLASMA SOURCE WITH MAGNE...
- Publication number 20150255242
- Publication date Sep 10, 2015
- ADVANCED ION BEAM TECHNOLOGY, INC.
- William DIVERGILIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE OF AN ION IMPLANTER
- Publication number 20150056380
- Publication date Feb 26, 2015
- ADVANCED ION BEAM TECHNOLOGY., INC.
- Stephen Edward Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DIELECTRIC DEPOSITION
- Publication number 20140314965
- Publication date Oct 23, 2014
- Stephen Edward Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PLASMA PROCESSING
- Publication number 20140220262
- Publication date Aug 7, 2014
- PlasmaSi, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Stephen Edward Savas

Person

Patents Grantslast 30 patents

Plasma non-uniformity detection

Variable mode plasma chamber utilizing tunable plasma potential

Sector shunts for plasma-based wafer processing systems

Enhanced ignition in inductively coupled plasmas for workpiece proc...

Inductive broad-band sensors for electromagnetic waves

Fast arc detecting match network

Pulsing control match network

Uniformity control for radio frequency plasma processing systems

Enhanced ignition in inductively coupled plasmas for workpiece proc...

Systems and methods for workpiece processing using neutral atom beams

Variable mode plasma chamber utilizing tunable plasma potential

Methods for tuning plasma potential using variable mode plasma chamber

Method and apparatus for surface preparation prior to epitaxial dep...

Methods for forming thin protective and optical layers on substrates

Exhaust manifold in a CVD reactor

Plasma generating units for processing a substrate

Ion source of an ion implanter

Method for depositing a multi-layer moisture barrier on electronic...

System and method for distributing RF power to a plasma source

Plasma-based material modification using a plasma source with magne...

Methods for plasma processing

Apparatus and method for dielectric deposition

Method for deposition of high-performance coatings and encapsulated...

Advanced multi-workpiece processing chamber

Methods for plasma processing

Methods for plasma processing

Apparatus and method for dielectric deposition

Methods for plasma processing

Slotted electrostatic shield modification for improved etch and CVD...

Method and apparatus for growing thin oxide films on silicon while...

Patents Applicationslast 30 patents

Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential

INDUCTIVE BROAD-BAND SENSORS FOR ELECTROMAGNETIC WAVES

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...

Apparatus and Method for Measuring Pedestal Voltage Uniformity in P...

FAST ARC DETECTING MATCH NETWORK

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...

Systems And Methods For Workpiece Processing Using Neutral Atom Beams

VARIABLE MODE PLASMA CHAMBER UTILIZING TUNABLE PLASMA POTENTIAL

PULSING CONTROL MATCH NETWORK AND GENERATOR

PLASMA NON-UNIFORMITY DETECTION

UNIFORMITY CONTROL FOR RADIO FREQUENCY PLASMA PROCESSING SYSTEMS

SECTOR SHUNTS FOR PLASMA-BASED WAFER PROCESSING SYSTEMS

AZIMUTHAL SENSOR ARRAY FOR RADIO FREQUENCY PLASMA-BASED WAFER PROCE...

FAST ARC DETECTING MATCH NETWORK

BROAD-BAND SENSORS FOR ELECTROMAGNETIC WAVES

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...

VARIABLE MODE PLASMA CHAMBER UTILIZING TUNABLE PLASMA POTENTIAL

METHODS FOR TUNING PLASMA POTENTIAL USING VARIABLE MODE PLASMA CHAMBER

Electrostatic Shield for Inductive Plasma Sources

Systems And Methods For Workpiece Processing Using Neutral Atom Beams

METHOD AND APPARATUS FOR SURFACE PREPARATION PRIOR TO EPITAXIAL DEP...

METHODS FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS ON SUBSTRATES

EXHAUST MANIFOLD IN A CVD REACTOR

APPARATUS AND METHOD FOR FORMING THIN PROTECTIVE AND OPTICAL LAYERS...

METHOD FOR DEPOSITION OF HIGH-PERFORMANCE COATINGS AND ENCAPSULATED...

METHODS FOR PLASMA PROCESSING

PLASMA-BASED MATERIAL MODIFICATION USING A PLASMA SOURCE WITH MAGNE...

ION SOURCE OF AN ION IMPLANTER

APPARATUS AND METHOD FOR DIELECTRIC DEPOSITION

METHODS FOR PLASMA PROCESSING