Stephen Gentile

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Single-chamber sequential curing of semiconductor wafers
- Patent number 8,951,348
- Issue date Feb 10, 2015
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single-chamber sequential curing of semiconductor wafers
- Patent number 8,137,465
- Issue date Mar 20, 2012
- Novellus Systems, Inc.
- Krishna Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal heat transfer and temperature control
- Patent number 7,941,039
- Issue date May 10, 2011
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cast pedestal with heating element and coaxial heat exchanger
- Patent number 7,327,948
- Issue date Feb 5, 2008
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...