Stephen Hilliker

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Los Gatos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
RF delivery configuration in a plasma processing system
- Patent number 7,042,311
- Issue date May 9, 2006
- Novellus Systems, Inc.
- Stephen E. Hilliker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorptive filter for semiconductor processing systems
- Patent number 6,631,693
- Issue date Oct 14, 2003
- Novellus Systems, Inc.
- Stephen E. Hilliker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum variable capacitor
- Patent number 6,473,289
- Issue date Oct 29, 2002
- Paralax, LLC
- Robert E. Weisse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency supply circuit for in situ cleaning of plasma-enhan...
- Patent number 6,199,506
- Issue date Mar 13, 2001
- Novellus Systems, Inc.
- Stephen Hilliker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Absorptive filter for semiconductor processing systems
- Publication number 20020100422
- Publication date Aug 1, 2002
- Stephen E. Hilliker
- H01 - BASIC ELECTRIC ELEMENTS