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Stephen Hyatt
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Wafer tilt detection apparatus and method
Patent number
7,561,258
Issue date
Jul 14, 2009
Mattson Technology, Inc.
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Wafer Tilt Detection Apparatus and Method
Publication number
20070269910
Publication date
Nov 22, 2007
Songlin Xu
H01 - BASIC ELECTRIC ELEMENTS