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San Jose, CA, US
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last 30 patents
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,986,926
Issue date
May 21, 2024
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,806,835
Issue date
Nov 7, 2023
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,077,536
Issue date
Aug 3, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
10,967,483
Issue date
Apr 6, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Endpoint control of multiple substrate zones of varying thickness i...
Patent number
10,589,397
Issue date
Mar 17, 2020
Applied Materials, Inc.
Alain Duboust
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Temperature control of chemical mechanical polishing
Patent number
9,005,999
Issue date
Apr 14, 2015
Applied Materials, Inc.
Kun Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Endpoint control of multiple substrates of varying thickness on the...
Patent number
8,694,144
Issue date
Apr 8, 2014
Applied Materials, Inc.
Alain Duboust
B24 - GRINDING POLISHING
Information
Patent Grant
Control of overpolishing of multiple substrates on the same platen...
Patent number
8,616,935
Issue date
Dec 31, 2013
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Endpoint control of multiple-wafer chemical mechanical polishing
Patent number
8,295,967
Issue date
Oct 23, 2012
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Use of pad conditioning in temperature controlled CMP
Patent number
8,292,691
Issue date
Oct 23, 2012
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate holder with liquid supporting surface
Patent number
8,021,211
Issue date
Sep 20, 2011
Applied Materials, Inc.
Hung Chih Chen
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20220402096
Publication date
Dec 22, 2022
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20210331288
Publication date
Oct 28, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20210205953
Publication date
Jul 8, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20170368663
Publication date
Dec 28, 2017
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20170368664
Publication date
Dec 28, 2017
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE SUBSTRATE ZONES OF VARYING THICKNESS I...
Publication number
20170151647
Publication date
Jun 1, 2017
Applied Materials, Inc.
Alain Duboust
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE...
Publication number
20140222188
Publication date
Aug 7, 2014
Applied Materials, Inc.
Alain Duboust
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONTROL OF POLISHING OF MULTIPLE SUBSTRATES ON THE SAME PLATEN IN C...
Publication number
20140030956
Publication date
Jan 30, 2014
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
Control Of Overpolishing Of Multiple Substrates On the Same Platen...
Publication number
20140024293
Publication date
Jan 23, 2014
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING
Publication number
20140004626
Publication date
Jan 2, 2014
Applied Materials, Inc.
KUN XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE...
Publication number
20120053717
Publication date
Mar 1, 2012
Alain Duboust
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TUNING OF POLISHING PROCESS IN MULTI-CARRIER HEAD PER PLATEN POLISH...
Publication number
20110300776
Publication date
Dec 8, 2011
Applied Materials, Inc.
David H. Mai
B24 - GRINDING POLISHING
Information
Patent Application
Control of Overpolishing of Multiple Substrates on the Same Platen...
Publication number
20110300775
Publication date
Dec 8, 2011
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING
Publication number
20100279435
Publication date
Nov 4, 2010
APPLIED MATERIALS, INC.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE-WAFER CHEMICAL MECHANICAL POLISHING
Publication number
20100120330
Publication date
May 13, 2010
Applied Materials, Inc.
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE-WAFER CHEMICAL MECHANICAL POLISHING
Publication number
20100120331
Publication date
May 13, 2010
Applied Materials, Inc.
Ingemar Carlsson
B24 - GRINDING POLISHING
Information
Patent Application
USE OF PAD CONDITIONING IN TEMPERATURE CONTROLLED CMP
Publication number
20100081360
Publication date
Apr 1, 2010
APPLIED MATERIALS, INC.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDER WITH LIQUID SUPPORTING SURFACE
Publication number
20090264056
Publication date
Oct 22, 2009
APPLIED MATERIALS, INC.
Hung Chih Chen
B24 - GRINDING POLISHING
Information
Patent Application
HIGH THROUGHPUT LOW TOPOGRAPHY COPPER CMP PROCESS
Publication number
20090057264
Publication date
Mar 5, 2009
APPLIED MATERIALS, INC.
DAVID H. MAI
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF SOFT PAD PREPARATION TO REDUCE REMOVAL RATE RAMP-UP EFFEC...
Publication number
20090061743
Publication date
Mar 5, 2009
STEPHEN JEW
B24 - GRINDING POLISHING