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Stephen L. Hill
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Vancouver, WA, US
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last 30 patents
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Patent Grant
Wafer stage position calibration method and system
Patent number
7,142,314
Issue date
Nov 28, 2006
Wafertech, LLC
Phong T. Nguyen
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Wafer stage position calibration method and system
Publication number
20050105102
Publication date
May 19, 2005
Phong T. Nguyen
G01 - MEASURING TESTING