Stephen P. Renwick

Person

San Bruno, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Euv lithography system for dense line patterning
- Patent number 11,099,483
- Issue date Aug 24, 2021
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High-resolution position encoder with image sensor and encoded targ...
- Patent number 11,061,338
- Issue date Jul 13, 2021
- NIKON CORPORATION
- Jonathan Kyle Wells
- G01 - MEASURING TESTING
Information Patent Grant
EUV lithography system for dense line patterning
- Patent number 10,890,849
- Issue date Jan 12, 2021
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial-frequency matched wafer alignment marks, wafer alignment an...
- Patent number 10,871,708
- Issue date Dec 22, 2020
- Nikon Corporation
- Steven Douglas Slonaker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for adjusting a lithographic scanner
- Patent number 8,438,507
- Issue date May 7, 2013
- Nikon Corporation
- Stephen P. Renwick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for an adjusting optical proximity effect for an...
- Patent number 8,300,214
- Issue date Oct 30, 2012
- Nikon Precision Inc.
- Stephen P. Renwick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to diagnose imperfections in illuminator of a lithographic tool
- Patent number 6,943,882
- Issue date Sep 13, 2005
- Nikon Precision, Inc.
- Stephen P. Renwick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CURVED RETICLE BY MECHANICAL AND PHASE BENDING ALONG ORTHOGONAL AXES
- Publication number 20220357666
- Publication date Nov 10, 2022
- Nikon Corporation
- Donis G. Flagello
- G02 - OPTICS
Information Patent Application
E-BEAM POSITION TRACKER
- Publication number 20220293390
- Publication date Sep 15, 2022
- Nikon Corporation
- Jacek Kazimierz Tyminski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-RESOLUTION POSITION ENCODER WITH IMAGE SENSOR AND ENCODED TARG...
- Publication number 20180217510
- Publication date Aug 2, 2018
- Nikon Corporation
- J. Kyle Wells
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPATIAL-FREQUENCY MATCHED WAFER ALIGNMENT MARKS, WAFER ALIGNMENT AN...
- Publication number 20180210332
- Publication date Jul 26, 2018
- Nikon Corporation
- Steven Douglas Slonaker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING
- Publication number 20170336715
- Publication date Nov 23, 2017
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING
- Publication number 20170336716
- Publication date Nov 23, 2017
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR AN ADJUSTING OPTICAL PROXIMITY EFFECT FOR AN...
- Publication number 20130044308
- Publication date Feb 21, 2013
- Nikon Precision Inc.
- Stephen P. Renwick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR ADJUSTING A LITHOGRAPHIC SCANNER
- Publication number 20100125823
- Publication date May 20, 2010
- Nikon Precision Inc.
- Stephen P. RENWICK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR AN ADJUSTING OPTICAL PROXIMITY EFFECT FOR AN...
- Publication number 20090213349
- Publication date Aug 27, 2009
- Nikon Corporation
- Stephen P. Renwick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to diagnose imperfections in illuminator of a lithographic tool
- Publication number 20040119957
- Publication date Jun 24, 2004
- Stephen P. Renwick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Stephen P. Renwick

Person

Patents Grantslast 30 patents

Euv lithography system for dense line patterning

High-resolution position encoder with image sensor and encoded targ...

EUV lithography system for dense line patterning

Spatial-frequency matched wafer alignment marks, wafer alignment an...

Systems and methods for adjusting a lithographic scanner

System and method for an adjusting optical proximity effect for an...

Method to diagnose imperfections in illuminator of a lithographic tool

Patents Applicationslast 30 patents

CURVED RETICLE BY MECHANICAL AND PHASE BENDING ALONG ORTHOGONAL AXES

E-BEAM POSITION TRACKER

HIGH-RESOLUTION POSITION ENCODER WITH IMAGE SENSOR AND ENCODED TARG...

SPATIAL-FREQUENCY MATCHED WAFER ALIGNMENT MARKS, WAFER ALIGNMENT AN...

EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING

EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING

SYSTEM AND METHOD FOR AN ADJUSTING OPTICAL PROXIMITY EFFECT FOR AN...

SYSTEMS AND METHODS FOR ADJUSTING A LITHOGRAPHIC SCANNER

SYSTEM AND METHOD FOR AN ADJUSTING OPTICAL PROXIMITY EFFECT FOR AN...

Method to diagnose imperfections in illuminator of a lithographic tool