TREA

STEPHEN R. BURGESS

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Patents Grantslast 30 patents

  • Information Patent Grant

    Deposition method of a metallic layer on a substrate of a resonator...
    • Patent number 12,043,891
    • Issue date Jul 23, 2024
    • SPTS Technologies Limited
    • Scott Haymore
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for controlling stress variation in a material...
    • Patent number 11,961,722
    • Issue date Apr 16, 2024
    • SPTS Technologies Limited
    • Anthony Wilby
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Apparatus and a method of controlling thickness variation in a mate...
    • Patent number 11,913,109
    • Issue date Feb 27, 2024
    • SPTS Technologies Limited
    • Tony Wilby
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for depositing a material
    • Patent number 11,875,980
    • Issue date Jan 16, 2024
    • Stephen R Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    DC magnetron sputtering
    • Patent number 11,718,908
    • Issue date Aug 8, 2023
    • SPTS Technologies Limited
    • Scott Haymore
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for controlling stress variation in a material...
    • Patent number 11,521,840
    • Issue date Dec 6, 2022
    • SPTS Technologies Limited
    • Anthony Wilby
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Grant

    Method of fabricating integrated circuits
    • Patent number 11,361,975
    • Issue date Jun 14, 2022
    • SPTS Technologies Limited
    • Tony Wilby
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of depositing silicon nitride
    • Patent number 11,251,037
    • Issue date Feb 15, 2022
    • SPTS Technologies Limited
    • Kathrine Crook
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 11,127,568
    • Issue date Sep 21, 2021
    • SPTS Technologies Limited
    • Stephen R Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    DC magnetron sputtering
    • Patent number 11,008,651
    • Issue date May 18, 2021
    • SPTS Technologies Limited
    • Scott Haymore
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Pre-cleaning a semiconductor structure
    • Patent number 10,978,291
    • Issue date Apr 13, 2021
    • SPTS Technologies Limited
    • Alex Theodosiou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for depositing a material
    • Patent number 10,900,114
    • Issue date Jan 26, 2021
    • Stephen R Burgess
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    SAW device and method of manufacture
    • Patent number 10,812,035
    • Issue date Oct 20, 2020
    • SPTS Technologies Limited
    • Rhonda Hyndman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 10,622,193
    • Issue date Apr 14, 2020
    • SPTS Technologies Limited
    • Stephen R Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of deposition
    • Patent number 10,601,388
    • Issue date Mar 24, 2020
    • Stephen R Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 10,153,135
    • Issue date Dec 11, 2018
    • SPTS Technologies Limited
    • Anthony Paul Wilby
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of improving adhesion
    • Patent number 10,096,468
    • Issue date Oct 9, 2018
    • SPTS Technologies Limited
    • Kathrine Crook
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deposition of silicon dioxide
    • Patent number 9,803,272
    • Issue date Oct 31, 2017
    • SPTS Technologies Limited
    • Yun Zhou
    • C01 - INORGANIC CHEMISTRY
  • Information Patent Grant

    PE-CVD apparatus and method
    • Patent number 9,783,886
    • Issue date Oct 10, 2017
    • SPTS Technologies Limited
    • Daniel T Archard
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of degassing
    • Patent number 9,728,432
    • Issue date Aug 8, 2017
    • SPTS Technologies Limited
    • Stephen R Burgess
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of supporting a workpiece during physical vapour deposition
    • Patent number 9,719,166
    • Issue date Aug 1, 2017
    • SPTS Technologies Limited
    • Stephen R Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods of depositing aluminium layers
    • Patent number 9,670,574
    • Issue date Jun 6, 2017
    • SPTS TECHNOLOGIES LIMITED
    • Rhonda Hyndman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate
    • Patent number 9,472,610
    • Issue date Oct 18, 2016
    • SPTS Technologies Limited
    • Katherine Crook
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of depositing silicone dioxide films
    • Patent number 9,165,762
    • Issue date Oct 20, 2015
    • SPTS Technologies Limited
    • Kathrine Crook
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of etching
    • Patent number 9,048,066
    • Issue date Jun 2, 2015
    • SPTS Technologies Limited
    • Stephen R Burgess
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for processing a semiconductor workpiece
    • Patent number 8,728,953
    • Issue date May 20, 2014
    • SPTS Technologies Limited
    • Stephen R Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of plasma vapour deposition
    • Patent number 8,337,675
    • Issue date Dec 25, 2012
    • SPTS Technologies Limited
    • Mark Ian Carruthers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of forming amorphous TiN by thermal chemical vapor depositio...
    • Patent number 7,732,307
    • Issue date Jun 8, 2010
    • Aviza Technology Limited
    • Stephen Robert Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Magnetron sputtering
    • Patent number 7,378,001
    • Issue date May 27, 2008
    • Aviza Europe Limited
    • Carsten Goergens
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of processing a workpiece
    • Patent number 7,282,158
    • Issue date Oct 16, 2007
    • Aviza Technology Limited
    • Stephen Robert Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Method of Operating a PVD Apparatus
    • Publication number 20240177997
    • Publication date May 30, 2024
    • SPTS TECHNOLOGIES LIMITED
    • Scott Haymore
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus and a Method of Controlling Thickness Variation in a Mate...
    • Publication number 20240014018
    • Publication date Jan 11, 2024
    • SPTS TECHNOLOGIES LIMITED
    • Tony WILBY
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF OPERATING A PVD APPARATUS
    • Publication number 20230212736
    • Publication date Jul 6, 2023
    • SPTS TECHNOLOGIES LIMITED
    • Scott HAYMORE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD Method and Apparatus
    • Publication number 20230136705
    • Publication date May 4, 2023
    • SPTS TECHNOLOGIES LIMITED
    • Scott Haymore
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method and Apparatus for Controlling Stress Variation in a Material...
    • Publication number 20230094699
    • Publication date Mar 30, 2023
    • SPTS Technologies Ltd.
    • Anthony WILBY
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    Deposition Method
    • Publication number 20210317565
    • Publication date Oct 14, 2021
    • SPTS TECHNOLOGIES LIMITED
    • Scott Haymore
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DC Magnetron Sputtering
    • Publication number 20210246545
    • Publication date Aug 12, 2021
    • SPTS TECHNOLOGIES LIMITED
    • SCOTT HAYMORE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PE-CVD APPARATUS AND METHOD
    • Publication number 20210246555
    • Publication date Aug 12, 2021
    • SPTS TECHNOLOGIES LIMITED
    • Stephen BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and Apparatus for Depositing a Material
    • Publication number 20210123130
    • Publication date Apr 29, 2021
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition Apparatus
    • Publication number 20210005439
    • Publication date Jan 7, 2021
    • SPTS TECHNOLOGIES LIMITED
    • Rhonda Hyndman
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    Method of Deposition
    • Publication number 20200365794
    • Publication date Nov 19, 2020
    • SPTS TECHNOLOGIES LIMITED
    • Adrian Thomas
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FABRICATING INTEGRATED CIRCUITS
    • Publication number 20200135490
    • Publication date Apr 30, 2020
    • SPTS TECHNOLOGIES LIMITED
    • TONY WILBY
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS AND A METHOD OF CONTROLLING THICKNESS VARIATION IN A MATE...
    • Publication number 20200090913
    • Publication date Mar 19, 2020
    • SPTS TECHNOLOGIES LIMITED
    • TONY WILBY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF DEPOSITING SILICON NITRIDE
    • Publication number 20200058498
    • Publication date Feb 20, 2020
    • SPTS TECHNOLOGIES LIMITED
    • Katherine Crook
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20190272980
    • Publication date Sep 5, 2019
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SAW DEVICE AND METHOD OF MANUFACTURE
    • Publication number 20190267962
    • Publication date Aug 29, 2019
    • SPTS TECHNOLOGIES LIMITED
    • RHONDA HYNDMAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR CONTROLLING STRESS VARIATION IN A MATERIAL...
    • Publication number 20180308670
    • Publication date Oct 25, 2018
    • SPTS TECHNOLOGIES LIMITED
    • ANTHONY WILBY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DC Magnetron Sputtering
    • Publication number 20170294294
    • Publication date Oct 12, 2017
    • SPTS TECHNOLOGIES LIMITED
    • SCOTT HAYMORE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF IMPROVING ADHESION
    • Publication number 20170178901
    • Publication date Jun 22, 2017
    • SPTS TECHNOLOGIES LIMITED
    • KATHRINE CROOK
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF DEPOSITION
    • Publication number 20170104465
    • Publication date Apr 13, 2017
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20160379807
    • Publication date Dec 29, 2016
    • SPTS TECHNOLOGIES LIMITED
    • ANTHONY PAUL WILBY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR DEPOSITING A MATERIAL
    • Publication number 20160289815
    • Publication date Oct 6, 2016
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PE-CVD APPARATUS AND METHOD
    • Publication number 20160265108
    • Publication date Sep 15, 2016
    • SPTS TECHNOLOGIES LIMITED
    • DANIEL T. ARCHARD
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PRODUCING APPARATUS
    • Publication number 20160240351
    • Publication date Aug 18, 2016
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF DEGASSING
    • Publication number 20160155652
    • Publication date Jun 2, 2016
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20160148787
    • Publication date May 26, 2016
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE
    • Publication number 20150357398
    • Publication date Dec 10, 2015
    • SPTS TECHNOLOGIES LIMITED
    • KATHERINE CROOK
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PROCESSING A SUBSTRATE
    • Publication number 20150225841
    • Publication date Aug 13, 2015
    • SPTS TECHNOLOGIES LIMITED
    • ANTHONY PAUL WILBY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION OF SILICON DIOXIDE
    • Publication number 20150125375
    • Publication date May 7, 2015
    • SPTS TECHNOLOGIES LIMITED
    • YUN ZHOU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Pre-Cleaning a Semiconductor Structure
    • Publication number 20150075973
    • Publication date Mar 19, 2015
    • SPTS TECHNOLOGIES LIMITED
    • ALEX THEODOSIOU
    • H01 - BASIC ELECTRIC ELEMENTS