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Stephen Thai
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Milpitas, CA, US
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last 30 patents
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Patent Grant
Plasma reactor with spoke antenna having a VHF mode with the spokes...
Patent number
6,667,577
Issue date
Dec 23, 2003
Applied Materials, Inc.
Steven Shannon
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Plasma reactor with spoke antenna having a VHF mode with the spokes...
Publication number
20030111962
Publication date
Jun 19, 2003
Steven Shannon
H01 - BASIC ELECTRIC ELEMENTS