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Stephen Tsu
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Los Gatos, CA, US
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last 30 patents
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Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
Publication number
20080014134
Publication date
Jan 17, 2008
APPLIED MATERIALS, INC.
Sebastien Raoux
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
Publication number
20080003150
Publication date
Jan 3, 2008
APPLIED MATERIALS, INC.
Sebastien Raoux
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
Publication number
20080003158
Publication date
Jan 3, 2008
APPLIED MATERIALS, INC.
Sebastien Raoux
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
Publication number
20080003151
Publication date
Jan 3, 2008
APPLIED MATERIALS, INC.
Sebastien Raoux
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
Publication number
20080003157
Publication date
Jan 3, 2008
APPLIED MATERIALS, INC.
Sebastien Raoux
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Methods and apparatus for process abatement
Publication number
20070086931
Publication date
Apr 19, 2007
Applied Materials, Inc.
Sebastien Raoux
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL