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Stephen Vargo

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  • Arcadia, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of enhancing an etch system
    • Patent number 7,838,322
    • Issue date Nov 23, 2010
    • Tessera MEMS Technologies, Inc.
    • Stephen Vargo
    • B81 - MICRO-STRUCTURAL TECHNOLOGY