Stephen Whitten

Person

Danville, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system including dual ion filter for downstrea...
- Patent number 11,967,486
- Issue date Apr 23, 2024
- Lam Research Corporation
- Andrew Stratton Bravo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peripherally engaging electrode carriers and assemblies incorporati...
- Patent number 8,276,604
- Issue date Oct 2, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of bonded silicon electrodes
- Patent number 8,221,552
- Issue date Jul 17, 2012
- Lam Research Corporation
- Duane Outka
- B08 - CLEANING
Information Patent Grant
Backside mounted electrode carriers and assemblies incorporating th...
- Patent number 8,171,877
- Issue date May 8, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processes for reconditioning multi-component electrodes
- Patent number 8,075,701
- Issue date Dec 13, 2011
- Lam Research Corporation
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
- Publication number 20240266147
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTIMIZING EDGE RADICAL FLUX IN A DOWNSTREAM PLASMA CHAMBER
- Publication number 20230298859
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
- Publication number 20220076924
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20120013242
- Publication date Jan 19, 2012
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES
- Publication number 20090325320
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...
- Publication number 20090321018
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20090322199
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning of bonded silicon electrodes
- Publication number 20080236618
- Publication date Oct 2, 2008
- LAM RESEARCH CORPORATION
- Duane Outka
- B08 - CLEANING

Stephen Whitten

Person

Patents Grantslast 30 patents

Substrate processing system including dual ion filter for downstrea...

Peripherally engaging electrode carriers and assemblies incorporati...

Cleaning of bonded silicon electrodes

Backside mounted electrode carriers and assemblies incorporating th...

Processes for reconditioning multi-component electrodes

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...

OPTIMIZING EDGE RADICAL FLUX IN A DOWNSTREAM PLASMA CHAMBER

SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES

PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

Cleaning of bonded silicon electrodes