-
EPI base ring
-
Patent number 10,119,192
-
Issue date Nov 6, 2018
-
Applied Materials, Inc.
-
Steve Aboagye
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Quartz upper and lower domes
-
Patent number 9,768,043
-
Issue date Sep 19, 2017
-
Applied Materials, Inc.
-
Anzhong Chang
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
EPI base ring
-
Patent number 9,322,097
-
Issue date Apr 26, 2016
-
Applied Materials, Inc.
-
Steve Aboagye
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...