Steve Babayan

Person

Los Altos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge ring lifting solution
- Patent number 12,094,752
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 12,009,244
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ apparatus for semiconductor process module
- Patent number 11,887,879
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 11,870,252
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Process kit ring adaptor
- Patent number 11,842,917
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ optical chamber surface and process sensor
- Patent number 11,735,401
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Chuang-Chia Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for determining a position of a ring within a...
- Patent number 11,721,569
- Issue date Aug 8, 2023
- Andrew Myles
- G05 - CONTROLLING REGULATING
Information Patent Grant
Azimuthally tunable multi-zone electrostatic chuck
- Patent number 11,622,419
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Chunlei Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing with cooled electrostatic chuck
- Patent number 11,569,114
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal repeatability and in-situ showerhead temperature monitoring
- Patent number 11,508,558
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Timothy Joseph Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenic electrostatic chuck
- Patent number 11,437,261
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge ring lifting solution
- Patent number 11,393,710
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenic electrostatic chuck
- Patent number 11,373,893
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ optical chamber surface and process sensor
- Patent number 11,114,286
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Chuang-Chia Lin
- G01 - MEASURING TESTING
Information Patent Grant
In-situ apparatus for semiconductor process module
- Patent number 11,075,105
- Issue date Jul 27, 2021
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit ring adaptor
- Patent number 10,964,584
- Issue date Mar 30, 2021
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 10,820,377
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 10,820,378
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Thermal repeatability and in-situ showerhead temperature monitoring
- Patent number 10,607,817
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Timothy Joseph Franklin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 10,535,544
- Issue date Jan 14, 2020
- Applied Materials, Inc.
- Vijay D. Parkhe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Azimuthally tunable multi-zone electrostatic chuck
- Patent number 10,440,777
- Issue date Oct 8, 2019
- Applied Materials, Inc.
- Chunlei Zhang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for enhanced flow detection repeatability of...
- Patent number 10,409,295
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Ming Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precision screen printing with sub-micron uniformity of metallizati...
- Patent number 10,410,900
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Shih-Ying Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Consolidated filter arrangement for devices in an RF environment
- Patent number 9,872,341
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 9,472,435
- Issue date Oct 18, 2016
- Applied Materials, Inc.
- Vijay D. Parkhe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Free-standing metallic article for semiconductors
- Patent number 8,940,998
- Issue date Jan 27, 2015
- GTAT Corporation
- Steve Babayan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Adaptable free-standing metallic article for semiconductors
- Patent number 8,936,709
- Issue date Jan 20, 2015
- GTAT Corporation
- Steve Babayan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Free-standing metallic article for semiconductors
- Patent number 8,916,038
- Issue date Dec 23, 2014
- GTAT Corporation
- Steve Babayan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Silicon carbide lamina
- Patent number 8,785,294
- Issue date Jul 22, 2014
- GTAT Corporation
- Venkatesan Murali
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER EDGE RING LIFTING SOLUTION
- Publication number 20240429088
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20240321620
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST GAS SWITCHING
- Publication number 20240203695
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Toan Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES
- Publication number 20240176334
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sidharth Bhatia
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
- Publication number 20240176312
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sidharth Bhatia
- G05 - CONTROLLING REGULATING
Information Patent Application
CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES
- Publication number 20240176336
- Publication date May 30, 2024
- Applied Materials, Inc.
- Sidharth Bhatia
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS
- Publication number 20240069537
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Gautham Gururaj Bammanahalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION
- Publication number 20230118651
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING A POSITION OF A RING WITHIN A...
- Publication number 20220406635
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Andrew MYLES
- G01 - MEASURING TESTING
Information Patent Application
WAFER EDGE RING LIFTING SOLUTION
- Publication number 20220319904
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PIN MECHANISM
- Publication number 20220293452
- Publication date Sep 15, 2022
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING WITH COOLED ELECTROSTATIC CHUCK
- Publication number 20220262664
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR
- Publication number 20210398785
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Chuang-Chia Lin
- G01 - MEASURING TESTING
Information Patent Application
IN-SITU APPARATUS FOR SEMICONDUCTOR PROCESS MODULE
- Publication number 20210351063
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER E...
- Publication number 20210335631
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Steven E. Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES
- Publication number 20210287881
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT RING ADAPTOR
- Publication number 20210217650
- Publication date Jul 15, 2021
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENIC ELECTROSTATIC CHUCK
- Publication number 20210082730
- Publication date Mar 18, 2021
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT
- Publication number 20210059018
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- Phillip Criminale
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PROCESS KIT RING ADAPTOR
- Publication number 20200373194
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20200373190
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR
- Publication number 20200321201
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- Chuang-Chia Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL REPEATABILITY AND IN-SITU SHOWERHEAD TEMPERATURE MONITORING
- Publication number 20200227242
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Timothy Joseph FRANKLIN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CRYOGENIC ELECTROSTATIC CHUCK
- Publication number 20200185248
- Publication date Jun 11, 2020
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20200152500
- Publication date May 14, 2020
- Applied Materials, Inc.
- Vijay D. PARKHE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
- Publication number 20200152425
- Publication date May 14, 2020
- Applied Materials, Inc.
- Vahid FIROUZDOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AZIMUTHALLY TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK
- Publication number 20200037399
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Chunlei ZHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR ENHANCED FLOW DETECTION REPEATABILITY OF...
- Publication number 20190391602
- Publication date Dec 26, 2019
- Applied Materials, Inc.
- Ming Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATI...
- Publication number 20190273008
- Publication date Sep 5, 2019
- Applied Materials, Inc.
- Shih-Ying Huang
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
IN-SITU APPARATUS FOR SEMICONDUCTOR PROCESS MODULE
- Publication number 20190088531
- Publication date Mar 21, 2019
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steve Babayan

Person

Patents Grantslast 30 patents

Process kit enclosure system

Wafer edge ring lifting solution

Tunable temperature controlled substrate support assembly

In-situ apparatus for semiconductor process module

Consolidated filter arrangement for devices in an RF environment

Process kit ring adaptor

In-situ optical chamber surface and process sensor

Method and apparatus for determining a position of a ring within a...

Azimuthally tunable multi-zone electrostatic chuck

Semiconductor processing with cooled electrostatic chuck

Thermal repeatability and in-situ showerhead temperature monitoring

Cryogenic electrostatic chuck

Wafer edge ring lifting solution

Cryogenic electrostatic chuck

In-situ optical chamber surface and process sensor

In-situ apparatus for semiconductor process module

Process kit ring adaptor

Consolidated filter arrangement for devices in an RF environment

Consolidated filter arrangement for devices in an RF environment

Thermal repeatability and in-situ showerhead temperature monitoring

Tunable temperature controlled substrate support assembly

Azimuthally tunable multi-zone electrostatic chuck

Methods and apparatus for enhanced flow detection repeatability of...

Precision screen printing with sub-micron uniformity of metallizati...

Consolidated filter arrangement for devices in an RF environment

Tunable temperature controlled substrate support assembly

Free-standing metallic article for semiconductors

Adaptable free-standing metallic article for semiconductors

Free-standing metallic article for semiconductors

Silicon carbide lamina

Patents Applicationslast 30 patents

WAFER EDGE RING LIFTING SOLUTION

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

FAST GAS SWITCHING

ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES

DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING

CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES

SUBSTRATE PLACEMENT OPTIMIZATION USING SUBSTRATE MEASUREMENTS

REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION

METHOD AND APPARATUS FOR DETERMINING A POSITION OF A RING WITHIN A...

WAFER EDGE RING LIFTING SOLUTION

LIFT PIN MECHANISM

SEMICONDUCTOR PROCESSING WITH COOLED ELECTROSTATIC CHUCK

IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR

IN-SITU APPARATUS FOR SEMICONDUCTOR PROCESS MODULE

SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER E...

METHODS AND APPARATUS FOR TUNING SEMICONDUCTOR PROCESSES

PROCESS KIT RING ADAPTOR

CRYOGENIC ELECTROSTATIC CHUCK

CONSOLIDATED FILTER ARRANGEMENT FOR DEVICES IN AN RF ENVIRONMENT

PROCESS KIT RING ADAPTOR

PROCESS KIT ENCLOSURE SYSTEM

IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR

THERMAL REPEATABILITY AND IN-SITU SHOWERHEAD TEMPERATURE MONITORING

CRYOGENIC ELECTROSTATIC CHUCK

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...

AZIMUTHALLY TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK

METHODS AND APPARATUS FOR ENHANCED FLOW DETECTION REPEATABILITY OF...

PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATI...

IN-SITU APPARATUS FOR SEMICONDUCTOR PROCESS MODULE