Steve G. Ghanayem

Person

Los Altos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 10,985,023
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid laser and implant treatment for overlay error correction
- Patent number 10,429,747
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- Mangesh Bangar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 9,601,339
- Issue date Mar 21, 2017
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 9,230,815
- Issue date Jan 5, 2016
- Appled Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scrubber box and methods for using the same
- Patent number 7,774,887
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Methods for surface activation by plasma immersion ion implantation...
- Patent number 7,745,309
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Randhir P S Thakur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrates and films with photoexcitation
- Patent number 7,601,652
- Issue date Oct 13, 2009
- Applied Materials, Inc.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scrubber box
- Patent number 7,377,002
- Issue date May 27, 2008
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Grant
Clog-resistant gas delivery system
- Patent number 7,192,486
- Issue date Mar 20, 2007
- Applied Materials, Inc.
- Won Bang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of increasing the etch selectivity of a contact sidewall to...
- Patent number 6,677,247
- Issue date Jan 13, 2004
- Applied Materials Inc.
- Zheng Yuan
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Tantalum nitride CVD deposition by tantalum oxide densification
- Patent number 6,638,810
- Issue date Oct 28, 2003
- Applied Materials, Inc.
- Mouloud Bakli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon layer to improve plug filling by CVD
- Patent number 6,602,770
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Sandeep A. Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support member for a processing chamber
- Patent number 6,464,795
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for aligning and controlling edge deposition o...
- Patent number 6,328,808
- Issue date Dec 11, 2001
- Applied Materials, Inc.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of tantalum nitride deposition by tantalum oxide densification
- Patent number 6,319,766
- Issue date Nov 20, 2001
- Applied Materials, Inc.
- Mouloud Bakli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of tungsten nitride by plasma enhanced chemical vapor de...
- Patent number 6,309,713
- Issue date Oct 30, 2001
- Applied Materials, Inc.
- Alfred Mak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon layer to improve plug filling by CVD
- Patent number 6,303,480
- Issue date Oct 16, 2001
- Applied Materials, Inc.
- Sandeep A. Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a gap filling refractory metal layer having redu...
- Patent number 6,271,129
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Steve Ghanayem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gate electrode connection structure by in situ chemical vapor depos...
- Patent number 6,251,190
- Issue date Jun 26, 2001
- Applied Materials, Inc.
- Alfred Mak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for delivering a gas
- Patent number 6,248,176
- Issue date Jun 19, 2001
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-notch thinning heater
- Patent number 6,210,483
- Issue date Apr 3, 2001
- Applied Materials, Inc.
- Ken Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for high rate deposition of tungsten
- Patent number 6,204,174
- Issue date Mar 20, 2001
- Applied Materials, Inc.
- Alexander D. Glew
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing particle contamination during waf...
- Patent number 6,192,601
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Steve G. Ghanayem
- B08 - CLEANING
Information Patent Grant
Apparatus and method for aligning and controlling edge deposition o...
- Patent number 6,186,092
- Issue date Feb 13, 2001
- Applied Materials, Inc.
- Kenneth Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-plasma halogenated gas flow prevent metal residues
- Patent number 6,174,373
- Issue date Jan 16, 2001
- Applied Materials, Inc.
- Steve Ghanayem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming gate electrode connection structure by in situ ch...
- Patent number 6,162,715
- Issue date Dec 19, 2000
- Applied Materials, Inc.
- Alfred Mak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition process for depositing tungsten
- Patent number 6,156,382
- Issue date Dec 5, 2000
- Applied Materials, Inc.
- Ravi Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for reducing particle contamination during wa...
- Patent number 6,106,634
- Issue date Aug 22, 2000
- Applied Materials, Inc.
- Steve G. Ghanayem
- B08 - CLEANING
Information Patent Grant
Non-plasma halogenated gas flow to prevent metal residues
- Patent number 6,070,599
- Issue date Jun 6, 2000
- Applied Materials, Inc.
- Steve Ghanayem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten
- Publication number 20210225655
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Xinyu Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID LASER AND IMPLANT TREATMENT FOR OVERLAY ERROR CORRECTION
- Publication number 20180136569
- Publication date May 17, 2018
- Applied Materials, Inc.
- Mangesh BANGAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten
- Publication number 20170194156
- Publication date Jul 6, 2017
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten
- Publication number 20160104624
- Publication date Apr 14, 2016
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING FLUORINE/CARBON-FREE CONFORMAL TUNGSTEN
- Publication number 20140120723
- Publication date May 1, 2014
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
- Publication number 20120210937
- Publication date Aug 23, 2012
- Applied Materials, Inc.
- RANDHIR THAKUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
- Publication number 20100173495
- Publication date Jul 8, 2010
- APPLIED MATERIALS, INC.
- Randhir Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SUBSTRATE SURFACE CLEANING SUITABLE FOR FABRICATING SIL...
- Publication number 20080268617
- Publication date Oct 30, 2008
- APPLIED MATERIALS, INC.
- Randhir P. S. Thakur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCRUBBER BOX AND METHODS FOR USING THE SAME
- Publication number 20080210258
- Publication date Sep 4, 2008
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
METHODS FOR SURFACE ACTIVATION BY PLASMA IMMERSION ION IMPLANTATION...
- Publication number 20080038900
- Publication date Feb 14, 2008
- Randhir P S Thakur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PHOTO-EXCITATION OF CHEMICALS FOR ATOMIC L...
- Publication number 20070259111
- Publication date Nov 8, 2007
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reaction chamber with opposing pockets for gas injection and exhaust
- Publication number 20070084406
- Publication date Apr 19, 2007
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING CHAMBER WITH DIFFUSER PLATE AND INJECTOR ASSEMBLY
- Publication number 20070084408
- Publication date Apr 19, 2007
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of treating films using UV-generated active species
- Publication number 20070042130
- Publication date Feb 22, 2007
- APPLIED MATERIALS, INC.
- Steve G. Ghanayem
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method for silicon based dielectric deposition and clean with photo...
- Publication number 20060286819
- Publication date Dec 21, 2006
- APPLIED MATERIALS, INC.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for treating substrates and films with photoexcitation
- Publication number 20060286820
- Publication date Dec 21, 2006
- APPLIED MATERIALS, INC.
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus using a batch processing chamber
- Publication number 20060156979
- Publication date Jul 20, 2006
- APPLIED MATERIALS, INC.
- Randhir Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Scrubber box and methods for using the same
- Publication number 20050087212
- Publication date Apr 28, 2005
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
In-situ health check of liquid injection vaporizer
- Publication number 20040163590
- Publication date Aug 26, 2004
- Applied Materials, Inc.
- Toan Tran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Clog-resistant gas delivery system
- Publication number 20040083962
- Publication date May 6, 2004
- Applied Materials, Inc.
- Won Bang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of increasing the etch selectivity of a contact sidewall to...
- Publication number 20030127427
- Publication date Jul 10, 2003
- Applied Materials, Inc.
- Zheng Yuan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In situ stabilized high concentration BPSG films for PMD application
- Publication number 20030019427
- Publication date Jan 30, 2003
- APPLIED MATERIALS, INC.
- Steve Ghanayem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tantalum nitride CVD deposition by tantalum oxide densification
- Publication number 20030008501
- Publication date Jan 9, 2003
- APPLIED MATERIALS, INC.
- Mouloud Bakli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon layer to improve plug filling by CVD
- Publication number 20020090796
- Publication date Jul 11, 2002
- APPLIED MATERIALS, INC.
- Sandeep A. Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition of tungsten nitride by plasma enhanced chemical vapor de...
- Publication number 20010016429
- Publication date Aug 23, 2001
- APPLIED MATERIALS, INC.
- Alfred Mak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steve G. Ghanayem

Person

Patents Grantslast 30 patents

Methods for depositing fluorine/carbon-free conformal tungsten

Methods for depositing fluorine/carbon-free conformal tungsten

Hybrid laser and implant treatment for overlay error correction

Methods for depositing fluorine/carbon-free conformal tungsten

Methods for depositing fluorine/carbon-free conformal tungsten

Scrubber box and methods for using the same

Methods for surface activation by plasma immersion ion implantation...

Method for treating substrates and films with photoexcitation

Scrubber box

Clog-resistant gas delivery system

Method of increasing the etch selectivity of a contact sidewall to...

Tantalum nitride CVD deposition by tantalum oxide densification

Silicon layer to improve plug filling by CVD

Substrate support member for a processing chamber

Apparatus and method for aligning and controlling edge deposition o...

Method of tantalum nitride deposition by tantalum oxide densification

Deposition of tungsten nitride by plasma enhanced chemical vapor de...

Silicon layer to improve plug filling by CVD

Method for forming a gap filling refractory metal layer having redu...

Gate electrode connection structure by in situ chemical vapor depos...

Apparatus and method for delivering a gas

Anti-notch thinning heater

Method for high rate deposition of tungsten

Method and apparatus for reducing particle contamination during waf...

Apparatus and method for aligning and controlling edge deposition o...

Non-plasma halogenated gas flow prevent metal residues

Method of forming gate electrode connection structure by in situ ch...

Chemical vapor deposition process for depositing tungsten

Methods and apparatus for reducing particle contamination during wa...

Non-plasma halogenated gas flow to prevent metal residues

Patents Applicationslast 30 patents

Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten

HYBRID LASER AND IMPLANT TREATMENT FOR OVERLAY ERROR CORRECTION

Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten

Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten

METHODS FOR DEPOSITING FLUORINE/CARBON-FREE CONFORMAL TUNGSTEN

SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER

SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER

METHODS FOR SUBSTRATE SURFACE CLEANING SUITABLE FOR FABRICATING SIL...

SCRUBBER BOX AND METHODS FOR USING THE SAME

METHODS FOR SURFACE ACTIVATION BY PLASMA IMMERSION ION IMPLANTATION...

METHOD AND APPARATUS FOR PHOTO-EXCITATION OF CHEMICALS FOR ATOMIC L...

Reaction chamber with opposing pockets for gas injection and exhaust

BATCH PROCESSING CHAMBER WITH DIFFUSER PLATE AND INJECTOR ASSEMBLY

Method of treating films using UV-generated active species

Method for silicon based dielectric deposition and clean with photo...

Method for treating substrates and films with photoexcitation

Substrate processing apparatus using a batch processing chamber

Scrubber box and methods for using the same

In-situ health check of liquid injection vaporizer

Clog-resistant gas delivery system

Method of increasing the etch selectivity of a contact sidewall to...

In situ stabilized high concentration BPSG films for PMD application

Tantalum nitride CVD deposition by tantalum oxide densification

Silicon layer to improve plug filling by CVD

Deposition of tungsten nitride by plasma enhanced chemical vapor de...