Steve Lee

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Variable temperature processes for tunable electrostatic chuck
- Patent number 6,921,724
- Issue date Jul 26, 2005
- Lam Research Corporation
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Variable temperature processes for tunable electrostatic chuck
- Publication number 20030186545
- Publication date Oct 2, 2003
- Lam Research Corporation, a Delaware Corporation
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS