Steve McPherson

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Menlo Park, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
RF RETURN PATH FOR LARGE PLASMA PROCESSING CHAMBER
- Publication number 20100089319
- Publication date Apr 15, 2010
- Applied Materials, Inc.
- Carl A. Sorensen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...