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Steve Szudarski
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Methods and apparatus for cooling a substrate support
Patent number
12,232,299
Issue date
Feb 18, 2025
Applied Materials, Inc.
Robert Irwin Decottignies
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Linked vacuum processing tools and methods of using the same
Patent number
9,147,592
Issue date
Sep 29, 2015
Applied Materials, Inc.
Eric A. Englhardt
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHODS AND APPARATUS FOR COOLING A SUBSTRATE SUPPORT
Publication number
20240130082
Publication date
Apr 18, 2024
Robert Irwin DECOTTIGNIES
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME
Publication number
20140044503
Publication date
Feb 13, 2014
Eric A. Englhardt
H01 - BASIC ELECTRIC ELEMENTS