Steve T. Drummond

Person

Merrimac, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ion source repeller
- Patent number 11,521,821
- Issue date Dec 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inert atmospheric pressure pre-chill and post-heat
- Patent number 9,711,324
- Issue date Jul 18, 2017
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck shielding mechanism
- Patent number 9,611,540
- Issue date Apr 4, 2017
- Axcelis Technologies, Inc.
- Kan Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated rotary seal and bearing for chilled ion implantation system
- Patent number 8,692,215
- Issue date Apr 8, 2014
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sliding wafer release gripper/wafer peeling gripper
- Patent number 7,751,172
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT
- Publication number 20240038490
- Publication date Feb 1, 2024
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER
- Publication number 20220319796
- Publication date Oct 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi Fluid Cooling System for Large Temperature Range Chuck
- Publication number 20150228514
- Publication date Aug 13, 2015
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inert Atmospheric Pressure Pre-Chill and Post-Heat
- Publication number 20130320208
- Publication date Dec 5, 2013
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM
- Publication number 20110291023
- Publication date Dec 1, 2011
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK SHIELDING MECHANISM
- Publication number 20100159153
- Publication date Jun 24, 2010
- Axcelis Technologies, Inc.
- Kan Ota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sliding wafer release gripper / wafer peeling gripper
- Publication number 20080100983
- Publication date May 1, 2008
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS

Steve T. Drummond

Person

Patents Grantslast 30 patents

Ion source repeller

Inert atmospheric pressure pre-chill and post-heat

Electrostatic chuck shielding mechanism

Heated rotary seal and bearing for chilled ion implantation system

Sliding wafer release gripper/wafer peeling gripper

Patents Applicationslast 30 patents

METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT

ION SOURCE REPELLER

Multi Fluid Cooling System for Large Temperature Range Chuck

Inert Atmospheric Pressure Pre-Chill and Post-Heat

HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM

ELECTROSTATIC CHUCK SHIELDING MECHANISM

Sliding wafer release gripper / wafer peeling gripper