Steven C. Hays

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Rowley, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for ion implantation with improved productivity a...
- Patent number 8,502,173
- Issue date Aug 6, 2013
- Axcelis Technologies. Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for ion implantation with improved productivity a...
- Patent number 8,278,634
- Issue date Oct 2, 2012
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Ion Implantation with Improved Productivity a...
- Publication number 20130026356
- Publication date Jan 31, 2013
- Axcelis Technologies Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Ion Implantation with Improved Productivity a...
- Publication number 20100308215
- Publication date Dec 9, 2010
- Axcelis Technologies Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam monitoring arrangement
- Publication number 20080169435
- Publication date Jul 17, 2008
- APPLIED MATERIALS, INC.
- Takao Sakase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shaped apertures in an ion implanter
- Publication number 20080099696
- Publication date May 1, 2008
- APPLIED MATERIALS, INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS