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San Diego, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Alignment of light source focus
Patent number
9,832,853
Issue date
Nov 28, 2017
ASML Netherlands B.V.
Matthew R. Graham
G01 - MEASURING TESTING
Information
Patent Grant
EUV LPP source with improved dose control by combining pulse modula...
Patent number
9,755,396
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Paul Frihauf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for return beam metrology with optical switch
Patent number
9,127,981
Issue date
Sep 8, 2015
Cymer, LLC
Matthew Graham
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Energy sensors for light beam alignment
Patent number
8,993,976
Issue date
Mar 31, 2015
ASML Netherlands B.V.
Matthew Graham
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of timing laser beam pulses to regulate extreme ultraviolet...
Patent number
8,872,122
Issue date
Oct 28, 2014
ASML Netherlands B.V.
Alexander Schafgans
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Alignment of light source focus
Patent number
8,648,999
Issue date
Feb 11, 2014
Cymer, LLC
Matthew R. Graham
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System and method to optimize extreme ultraviolet light generation
Patent number
8,598,552
Issue date
Dec 3, 2013
Cymer, Inc.
Paul Frihauf
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
System and Method for Return Beam Metrology with Optical Switch
Publication number
20150041659
Publication date
Feb 12, 2015
CYMER, LLC
Matthew Graham
G01 - MEASURING TESTING
Information
Patent Application
Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet...
Publication number
20140191132
Publication date
Jul 10, 2014
Cymer, Inc.
Alexander Schafgans
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ALIGNMENT OF LIGHT SOURCE FOCUS
Publication number
20140151583
Publication date
Jun 5, 2014
Matthew R. Graham
G01 - MEASURING TESTING
Information
Patent Application
System and Method To Optimize Extreme Ultraviolet Light Generation
Publication number
20130320244
Publication date
Dec 5, 2013
Cymer, Inc.
Paul Frihauf
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Energy Sensors for Light Beam Alignment
Publication number
20130043401
Publication date
Feb 21, 2013
Cymer, Inc.
Matthew Graham
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ALIGNMENT OF LIGHT SOURCE FOCUS
Publication number
20120019826
Publication date
Jan 26, 2012
Cymer, Inc.
Matthew R. Graham
G01 - MEASURING TESTING