Steven D. Berger

Person

Basking Ridge, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Device manufacture involving lithographic processing
- Patent number RE36964
- Issue date Nov 21, 2000
- Lucent Technologies Inc.
- Steven David Berger
- 430 - Radiation imagery chemistry: process, composition, or product thereof
Information Patent Grant
Projection lithography apparatus
- Patent number 5,701,014
- Issue date Dec 23, 1997
- Lucent Technologies Inc.
- Steven David Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for device fabrication using projection lithography and an...
- Patent number 5,561,008
- Issue date Oct 1, 1996
- Lucent Technologies Inc.
- Steven D. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Processes for electron lithography
- Patent number 5,382,498
- Issue date Jan 17, 1995
- AT&T Corp.
- Steven D. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device fabrication entailing submicron imaging
- Patent number 5,376,505
- Issue date Dec 27, 1994
- AT&T Corp.
- Steven D. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sub-micron device fabrication using multiple aperture filter
- Patent number 5,316,879
- Issue date May 31, 1994
- AT&T Bell Laboratories
- Steven D. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Projection electron lithographic procedure
- Patent number 5,279,925
- Issue date Jan 18, 1994
- AT&T Bell Laboratories
- Steven D. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacture involving step-and-scan delineation
- Patent number 5,260,151
- Issue date Nov 9, 1993
- AT&T Bell Laboratories
- Steven D. Berger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacture involving lithographic processing
- Patent number 5,258,246
- Issue date Nov 2, 1993
- AT&T Bell Laboratories
- Steven D. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device manufacture involving lithographic processing
- Patent number 5,130,213
- Issue date Jul 14, 1992
- AT&T Bell Laboratories
- Steven D. Berger
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device manufacture involving lithographic processing
- Patent number 5,079,112
- Issue date Jan 7, 1992
- AT&T Bell Laboratories
- Steven D. Berger
- B82 - NANO-TECHNOLOGY

Steven D. Berger

Person

Patents Grantslast 30 patents

Device manufacture involving lithographic processing

Projection lithography apparatus

Process for device fabrication using projection lithography and an...

Processes for electron lithography

Device fabrication entailing submicron imaging

Sub-micron device fabrication using multiple aperture filter

Projection electron lithographic procedure

Device manufacture involving step-and-scan delineation

Device manufacture involving lithographic processing

Device manufacture involving lithographic processing

Device manufacture involving lithographic processing