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Steven D. Gardner
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Westford, MA, US
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last 30 patents
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Patent Grant
High speed lithography machine and method
Patent number
7,385,671
Issue date
Jun 10, 2008
Azores Corporation
Steven D. Gardner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Blade for Substrate Edge Protection During Photolithography
Publication number
20150234281
Publication date
Aug 20, 2015
Rudolph Technologies, Inc.
Steven D. Gardner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High speed lithography machine and method
Publication number
20050264777
Publication date
Dec 1, 2005
Azores Corporation
Steven D. Gardner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY