Steven D. Marcus

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Hot showerhead
- Patent number 11,946,140
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant film on a chamber component and methods of depo...
- Patent number 11,932,938
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas separation control in spatial atomic layer deposition
- Patent number 11,821,083
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods of protecting nickel and nickel containing...
- Patent number 11,658,014
- Issue date May 23, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas separation control in spatial atomic layer deposition
- Patent number 11,230,763
- Issue date Jan 25, 2022
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-aligned double patterning with spatial atomic layer deposition
- Patent number 11,164,753
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas separation control in spatial atomic layer deposition
- Patent number 10,570,511
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES
- Publication number 20240117491
- Publication date Apr 11, 2024
- Hanish Kumar PANAVALAPPIL KUMARANKUTTY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...
- Publication number 20240003003
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING INTERIOR SURFACES OF COMPLEX BODIES BY ATOMIC LAYER DEPOSITION
- Publication number 20230323531
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Joseph Frederick Behnke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20230074149
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Michael R. RICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT SHOWERHEAD
- Publication number 20220307131
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Separation Control in Spatial Atomic Layer Deposition
- Publication number 20220119942
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self-Aligned Double Patterning With Spatial Atomic Layer Deposition
- Publication number 20220059362
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...
- Publication number 20210319983
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...
- Publication number 20210032745
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Separation Control in Spatial Atomic Layer Deposition
- Publication number 20200149161
- Publication date May 14, 2020
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Separation Control in Spatial Atomic Layer Deposition
- Publication number 20160068953
- Publication date Mar 10, 2016
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CARBON AND OXIDE DOPING OF ATOMIC LAYER DEPOSITION SILICON...
- Publication number 20150252477
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Victor NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAMLESS GAP-FILL WITH SPATIAL ATOMIC LAYER DEPOSITION
- Publication number 20150255324
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Ning LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-Aligned Double Patterning With Spatial Atomic Layer Deposition
- Publication number 20150200110
- Publication date Jul 16, 2015
- Applied Materials, Inc.
- Ning Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method And Apparatus For Low Temperature ALD Deposition
- Publication number 20140023794
- Publication date Jan 23, 2014
- Maitreyee Mahajani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self-Contained Heating Element
- Publication number 20130164445
- Publication date Jun 27, 2013
- Garry K. Kwong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Component Film Deposition
- Publication number 20130143415
- Publication date Jun 6, 2013
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactant Delivery System For ALD/CVD Processes
- Publication number 20130019960
- Publication date Jan 24, 2013
- Applied Materials, Inc.
- Kenric Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use
- Publication number 20120269967
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steven D. Marcus

Person

Patents Grantslast 30 patents

Hot showerhead

Corrosion resistant film on a chamber component and methods of depo...

Gas separation control in spatial atomic layer deposition

Apparatuses and methods of protecting nickel and nickel containing...

Gas separation control in spatial atomic layer deposition

Self-aligned double patterning with spatial atomic layer deposition

Gas separation control in spatial atomic layer deposition

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES

CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...

COATING INTERIOR SURFACES OF COMPLEX BODIES BY ATOMIC LAYER DEPOSITION

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

HOT SHOWERHEAD

Gas Separation Control in Spatial Atomic Layer Deposition

Self-Aligned Double Patterning With Spatial Atomic Layer Deposition

APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...

CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...

Gas Separation Control in Spatial Atomic Layer Deposition

Gas Separation Control in Spatial Atomic Layer Deposition

IN-SITU CARBON AND OXIDE DOPING OF ATOMIC LAYER DEPOSITION SILICON...

SEAMLESS GAP-FILL WITH SPATIAL ATOMIC LAYER DEPOSITION

Self-Aligned Double Patterning With Spatial Atomic Layer Deposition

Method And Apparatus For Low Temperature ALD Deposition

Self-Contained Heating Element

Multi-Component Film Deposition

Reactant Delivery System For ALD/CVD Processes

Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use