Steven D. Ward

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for dynamically mixing slurry for chemical mec...
- Patent number 5,750,440
- Issue date May 12, 1998
- Motorola, Inc.
- James F. Vanell
- B24 - GRINDING POLISHING
Information Patent Grant
Method for cleaning a process chamber
- Patent number 5,693,147
- Issue date Dec 2, 1997
- Motorola, Inc.
- Steven D. Ward
- B08 - CLEANING