Steven Donnell

Person

Burlington, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck having a gas flow feature, and related methods
- Patent number 11,837,492
- Issue date Dec 5, 2023
- Entegris, Inc.
- Yan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with charge dissipation coating
- Patent number 11,742,781
- Issue date Aug 29, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck with embossments that comprise diamond-like car...
- Patent number 11,612,972
- Issue date Mar 28, 2023
- Entegris, Inc.
- Yan Liu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Grounding mechanism for multi-layer for electrostatic chuck, and re...
- Patent number 11,309,207
- Issue date Apr 19, 2022
- Entegris, Inc.
- Steven Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High conductivity electrostatic chuck
- Patent number 9,692,325
- Issue date Jun 27, 2017
- Entegris, Inc.
- David Suuronen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck with polymer protrusions
- Patent number 8,879,233
- Issue date Nov 4, 2014
- Entegris, Inc.
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK
- Publication number 20240286398
- Publication date Aug 29, 2024
- Entegris, Inc.
- Chiranjeevi PYDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH A CHARGE DISSIPATION STRUCTURE
- Publication number 20230274967
- Publication date Aug 31, 2023
- Entegris, Inc.
- Jakub Rybczynski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES...
- Publication number 20230136703
- Publication date May 4, 2023
- Entegris, Inc.
- Yan Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK
- Publication number 20230060192
- Publication date Mar 2, 2023
- Entegris, Inc.
- Chiranjeevi PYDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CAR...
- Publication number 20220063035
- Publication date Mar 3, 2022
- Entegris, Inc.
- Yan LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS
- Publication number 20210351061
- Publication date Nov 11, 2021
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RE...
- Publication number 20210028046
- Publication date Jan 28, 2021
- Entegris, Inc.
- Steven DONNELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH CHARGE DISSIPATION COATING
- Publication number 20200161158
- Publication date May 21, 2020
- Entegris, Inc.
- Yan LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Conductivity Electrostatic Chuck
- Publication number 20130155569
- Publication date Jun 20, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David Suuronen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Coated Graphite Article And Reactive Ion Etch Manufacturing And Ref...
- Publication number 20130108863
- Publication date May 2, 2013
- Entegris, Inc.
- Richard A. Cooke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck With Polymer Protrusions
- Publication number 20120044609
- Publication date Feb 23, 2012
- Richard A. Cooke
- H01 - BASIC ELECTRIC ELEMENTS

Steven Donnell

Person

Patents Grantslast 30 patents

Electrostatic chuck having a gas flow feature, and related methods

Electrostatic chuck with charge dissipation coating

Electrostatic chuck with embossments that comprise diamond-like car...

Grounding mechanism for multi-layer for electrostatic chuck, and re...

High conductivity electrostatic chuck

Electrostatic chuck with polymer protrusions

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK WITH A CHARGE DISSIPATION STRUCTURE

ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES...

METHODS AND APPARATUS FOR PROCESSING AN ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK WITH EMBOSSMENTS THAT COMPRISE DIAMOND-LIKE CAR...

ELECTROSTATIC CHUCK HAVING A GAS FLOW FEATURE, AND RELATED METHODS

GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RE...

ELECTROSTATIC CHUCK WITH CHARGE DISSIPATION COATING

High Conductivity Electrostatic Chuck

Coated Graphite Article And Reactive Ion Etch Manufacturing And Ref...

Electrostatic Chuck With Polymer Protrusions