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Steven E. Gianoulakis
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Albuquerque, NM, US
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Patents Grants
last 30 patents
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Patent Grant
Low thermal distortion extreme-UV lithography reticle
Patent number
6,441,885
Issue date
Aug 27, 2002
EUV LLC
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Low thermal distortion Extreme-UV lithography reticle and method
Patent number
6,395,455
Issue date
May 28, 2002
EUV LLC
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Low thermal distortion extreme-UV lithography reticle
Patent number
6,316,150
Issue date
Nov 13, 2001
EUV LLC
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Low thermal distortion extreme-UV lithography reticle
Publication number
20020006556
Publication date
Jan 17, 2002
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Application
Low thermal distortion Extreme-UV lithography reticle
Publication number
20020001760
Publication date
Jan 3, 2002
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY