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Steven E. Kelly
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Kalispell, MT, US
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last 30 patents
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Patent Grant
Apparatus and methods for controlling workpiece surface exposure to...
Patent number
6,602,383
Issue date
Aug 5, 2003
Semitool, Inc.
Robert W. Batz
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for controlling semiconductor workpiece surface exposure to...
Patent number
6,090,711
Issue date
Jul 18, 2000
Semitool, Inc.
Robert W. Batz
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR