Steven E. Parks

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for protection of vacuum seals in plasma processi...
- Patent number 10,049,858
- Issue date Aug 14, 2018
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for CVD and thermal processing of semiconducto...
- Patent number 6,301,434
- Issue date Oct 9, 2001
- Mattson Technology, Inc.
- James McDiarmid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
System and Method for Protection of Vacuum Seals in Plasma Processi...
- Publication number 20160013025
- Publication date Jan 14, 2016
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS