Steven E. Staller

Person

Kokomo, IN, US

People

Patents Grantslast 30 patents

Information Patent Grant
All-silicon capacitive pressure sensor
- Patent number 5,936,164
- Issue date Aug 10, 1999
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
All-silicon monolithic motion sensor with integrated conditioning c...
- Patent number 5,721,162
- Issue date Feb 24, 1998
- Delco Electronics Corporation
- Peter James Schubert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making an all-silicon capacitive pressure sensor
- Patent number 5,706,565
- Issue date Jan 13, 1998
- Delco Electronics Corporation
- Douglas Ray Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Method of making a bridge-supported accelerometer structure
- Patent number 5,415,726
- Issue date May 16, 1995
- Delco Electronics Corporation
- Steven E. Staller
- G01 - MEASURING TESTING
Information Patent Grant
Method of bonding silicon wafers at temperatures below 500 degrees...
- Patent number 5,413,955
- Issue date May 9, 1995
- Delco Electronics Corporation
- Han-Sheng Lee
- G01 - MEASURING TESTING
Information Patent Grant
Method of making and sealing a semiconductor device having an air p...
- Patent number 5,369,057
- Issue date Nov 29, 1994
- Delco Electronics Corporation
- Han-Sheng Lee
- G01 - MEASURING TESTING
Information Patent Grant
Microaccelerometer having low stress bonds and means for preventing...
- Patent number 5,284,057
- Issue date Feb 8, 1994
- Delco Electronics Corporation
- Steven E. Staller
- G01 - MEASURING TESTING
Information Patent Grant
Method of making a microaccelerometer having low stress bonds and m...
- Patent number 5,221,400
- Issue date Jun 22, 1993
- Delco Electronics Corporation
- Steven E. Staller
- G01 - MEASURING TESTING
Information Patent Grant
Method for forming thin silicon membrane or beam
- Patent number 5,068,203
- Issue date Nov 26, 1991
- Delco Electronics Corporation
- James H. Logsdon
- G01 - MEASURING TESTING

Steven E. Staller

Person

Patents Grantslast 30 patents

All-silicon capacitive pressure sensor

All-silicon monolithic motion sensor with integrated conditioning c...

Method for making an all-silicon capacitive pressure sensor

Method of making a bridge-supported accelerometer structure

Method of bonding silicon wafers at temperatures below 500 degrees...

Method of making and sealing a semiconductor device having an air p...

Microaccelerometer having low stress bonds and means for preventing...

Method of making a microaccelerometer having low stress bonds and m...

Method for forming thin silicon membrane or beam