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Steven Grzeskowiak
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Albany, NY, US
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last 30 patents
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Patent Application
Method and Apparatus for In-Situ Dry Development
Publication number
20240096622
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Steven Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Double Patterning Method of Patterning a Substrate
Publication number
20240087892
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Patterning a Semiconductor Substrate
Publication number
20240063019
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Alexandra Krawicz
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DOUBLE HARDMASKS FOR SELF-ALIGNED MULTI-PATTERNING PROCESSES
Publication number
20240047210
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UV Treatment of EUV Resists
Publication number
20230152705
Publication date
May 18, 2023
TOKYO ELECTRON LIMITED
Steven Grzeskowiak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Hybrid Development of EUV Resists
Publication number
20230078946
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Steven Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS