Steven Hurwitt

Person

Park Ridge, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus with isolated coolant and sputtering target th...
- Patent number 6,689,254
- Issue date Feb 10, 2004
- Tokyo Electron Limited
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sputter coating with variable target to su...
- Patent number 6,623,606
- Issue date Sep 23, 2003
- Tokyo Electron Limited of IBS Broadcast Center
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode having variable magnet configuration
- Patent number 6,464,841
- Issue date Oct 15, 2002
- Tokyo Electron Limited
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sputter coating with variable target to su...
- Patent number 6,416,635
- Issue date Jul 9, 2002
- Tokyo Electron Limited
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor processing of a surface with non-uniformity compensa...
- Patent number 6,224,724
- Issue date May 1, 2001
- Tokyo Electron Limited
- Thomas J. Licata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for thermal control of variously sized articles in vacuum
- Patent number 6,183,523
- Issue date Feb 6, 2001
- Tokyo Electron Limited
- Steven Hurwitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus with low particle generating vacuum seal
- Patent number 6,032,419
- Issue date Mar 7, 2000
- Tokyo Electron Limited
- Steven D. Hurwitt
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus and method for clamping a substrate
- Patent number 5,925,226
- Issue date Jul 20, 1999
- Tokyo Electron Limited
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite backing plate for a sputtering target
- Patent number 5,879,524
- Issue date Mar 9, 1999
- Sony Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming a magnetically oriented thin film
- Patent number 5,804,041
- Issue date Sep 8, 1998
- Sony Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic device for rotating a substrate
- Patent number 5,795,448
- Issue date Aug 18, 1998
- Sony Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering cathode with uniformity compensation
- Patent number 5,783,048
- Issue date Jul 21, 1998
- Tokyo Electron Limited
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of pretexturing a cathode sputtering target and sputter coat...
- Patent number 5,632,869
- Issue date May 27, 1997
- Sony Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus having an on board service module
- Patent number 5,620,578
- Issue date Apr 15, 1997
- Sony Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cooling a sputtering target
- Patent number 5,569,361
- Issue date Oct 29, 1996
- Sony Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for trapping, signalling presence of and collecting debri...
- Patent number 5,562,819
- Issue date Oct 8, 1996
- Fresh Creek Technologies, Inc.
- Richard R. Turner
- E03 - WATER SUPPLY SEWERAGE
Information Patent Grant
High utilization sputtering target for cathode assembly
- Patent number 5,490,914
- Issue date Feb 13, 1996
- Sony Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced stress sputtering target and method of manufacturing therefor
- Patent number 5,474,667
- Issue date Dec 12, 1995
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target with machine readable indicia
- Patent number 5,449,445
- Issue date Sep 12, 1995
- Materials Research Corporation
- Frank M. Shinneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stationary aperture plate for reactive sputter deposition
- Patent number 5,415,753
- Issue date May 16, 1995
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target cooling and support for magnetron sputter coating apparatus
- Patent number 5,409,590
- Issue date Apr 25, 1995
- Materials Research Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma shaping plug for control of sputter etching
- Patent number 5,391,281
- Issue date Feb 21, 1995
- Materials Research Corp.
- Robert Hieronymi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for containment of overflow and runoff water
- Patent number 5,366,322
- Issue date Nov 22, 1994
- Fresh Creek Technologies, Inc.
- Steven Hurwitt
- E03 - WATER SUPPLY SEWERAGE
Information Patent Grant
Sputter coating collimator with integral reactive gas distribution
- Patent number 5,346,601
- Issue date Sep 13, 1994
- Andrew Barada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for cathode sputtering
- Patent number 5,336,386
- Issue date Aug 9, 1994
- Materials Research Corporation
- Daniel R. Marx
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for sputter coating employing machine readable...
- Patent number 5,284,561
- Issue date Feb 8, 1994
- Materials Research Corporation
- Frank M. Shinneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for reducing particulate contamination
- Patent number 5,237,756
- Issue date Aug 24, 1993
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extended lifetime collimator
- Patent number 5,223,108
- Issue date Jun 29, 1993
- Materials Research Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of preventing condensation of air borne moisture onto object...
- Patent number 5,205,051
- Issue date Apr 27, 1993
- Materials Research Corporation
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of enhancing the performance of a magnetron sputtering target
- Patent number 5,174,875
- Issue date Dec 29, 1992
- Materials Research Corporation
- Steven D. Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for sputter coating with variable target to su...
- Publication number 20020144891
- Publication date Oct 10, 2002
- Tokyo Electron Limited of TBS Broadcast Center
- Steven Hurwitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steven Hurwitt

Person

Patents Grantslast 30 patents

Sputtering apparatus with isolated coolant and sputtering target th...

Method and apparatus for sputter coating with variable target to su...

Cathode having variable magnet configuration

Method and apparatus for sputter coating with variable target to su...

Physical vapor processing of a surface with non-uniformity compensa...

Apparatus for thermal control of variously sized articles in vacuum

Vacuum processing apparatus with low particle generating vacuum seal

Apparatus and method for clamping a substrate

Composite backing plate for a sputtering target

Method and apparatus for forming a magnetically oriented thin film

Magnetic device for rotating a substrate

Sputtering cathode with uniformity compensation

Method of pretexturing a cathode sputtering target and sputter coat...

Sputtering apparatus having an on board service module

Method and apparatus for cooling a sputtering target

Apparatus for trapping, signalling presence of and collecting debri...

High utilization sputtering target for cathode assembly

Reduced stress sputtering target and method of manufacturing therefor

Sputtering target with machine readable indicia

Stationary aperture plate for reactive sputter deposition

Target cooling and support for magnetron sputter coating apparatus

Plasma shaping plug for control of sputter etching

Apparatus for containment of overflow and runoff water

Sputter coating collimator with integral reactive gas distribution

Target for cathode sputtering

Method and apparatus for sputter coating employing machine readable...

Method and apparatus for reducing particulate contamination

Extended lifetime collimator

Method of preventing condensation of air borne moisture onto object...

Method of enhancing the performance of a magnetron sputtering target

Patents Applicationslast 30 patents

Method and apparatus for sputter coating with variable target to su...