Membership
Tour
Register
Log in
Steven J. Kirch
Follow
Person
Lagrangeville, NY, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Gas delivery for ion beam deposition and etching
Patent number
5,149,974
Issue date
Sep 22, 1992
International Business Machines Corporation
Steven J. Kirch
H01 - BASIC ELECTRIC ELEMENTS