Steven J. Lakeman

Follow

Person

Newbury Park, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Unconsumed precursor monitoring
- Patent number 11,929,270
- Issue date Mar 12, 2024
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Unconsumed precursor monitoring
- Patent number 11,335,575
- Issue date May 17, 2022
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inter-process sensing of wafer outcome
- Patent number 7,257,494
- Issue date Aug 14, 2007
- Inficon, Inc.
- William T. Conner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR DECONVOLUTION OF REAL-TIME MASS FROM THE INFL...
- Publication number 20240241083
- Publication date Jul 18, 2024
- Inficon, Inc.
- Chunhua Song
- G01 - MEASURING TESTING
Information Patent Application
UNCONSUMED PRECURSOR MONITORING
- Publication number 20220285184
- Publication date Sep 8, 2022
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNCONSUMED PRECURSOR MONITORING
- Publication number 20200176291
- Publication date Jun 4, 2020
- Inficon Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU ION SOURCE CLEANING FOR PARTIAL PRESSURE ANALYZERS USED IN...
- Publication number 20090014644
- Publication date Jan 15, 2009
- Inficon, Inc.
- Chenglong Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inter-process sensing of wafer outcome
- Publication number 20050256653
- Publication date Nov 17, 2005
- Inficon, Inc.
- William T. Conner
- H01 - BASIC ELECTRIC ELEMENTS