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COMPOSITION AND METHOD FOR COBALT CMP
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Publication number 20230059396
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Publication date Feb 23, 2023
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CMC Materials, Inc.
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Fernando HUNG LOW
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COMPOSITION AND METHOD FOR DIELECTRIC CMP
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Publication number 20210115299
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Publication date Apr 22, 2021
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CMC Materials, Inc.
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Sarah BROSNAN
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COMPOSITION AND METHOD FOR COPPER BARRIER CMP
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Publication number 20200172762
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Publication date Jun 4, 2020
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Cabot Microelectronics Corporation
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Steven KRAFT
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COMPOSITION AND METHOD FOR COBALT CMP
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Publication number 20200172759
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Publication date Jun 4, 2020
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Cabot Microelectronics Corporation
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Fernando HUNG LOW
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COMPOSITION AND METHOD FOR METAL CMP
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Publication number 20200172760
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Publication date Jun 4, 2020
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Cabot Microelectronics Corporation
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Steven KRAFT
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COMPOSITION AND METHOD FOR SILICON NITRIDE CMP
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Publication number 20200172761
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Publication date Jun 4, 2020
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Cabot Microelectronics Corporation
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Fernando HUNG LOW
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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ALTERNATIVE OXIDIZING AGENTS FOR COBALT CMP
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Publication number 20180016469
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Publication date Jan 18, 2018
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Cabot Microelectronics Corporation
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Steven KRAFT
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COBALT POLISHING ACCELERATORS
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Publication number 20170260421
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Publication date Sep 14, 2017
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Cabot Microelectronics Corporation
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Steven Kraft
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF POLISHING A LOW-K SUBSTRATE
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Publication number 20170194160
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Publication date Jul 6, 2017
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Cabot Microelectronics Corporation
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Sudeep PALLIKKARA KUTTIATOOR
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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POLISHING COMPOSITION CONTAINING CERIA ABRASIVE
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Publication number 20170044403
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Publication date Feb 16, 2017
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Cabot Microelectronics Corporation
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Brian REISS
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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POLISHING COMPOSITION CONTAINING CERIA ABRASIVE
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Publication number 20160257856
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Publication date Sep 8, 2016
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Cabot Microelectronics Corporation
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Brian REISS
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COBALT POLISHING ACCELERATORS
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Publication number 20160115353
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Publication date Apr 28, 2016
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Cabot Microelectronics Corporation
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Steven Kraft
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COBALT DISHING CONTROL AGENTS
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Publication number 20160108285
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Publication date Apr 21, 2016
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Cabot Microelectronics Corporation
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Steven Kraft
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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