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Steven Liu
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Pingzhen City, TW
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last 30 patents
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Patent Grant
Method of optimizing lithography tools utilization
Patent number
9,081,306
Issue date
Jul 14, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Yao-Hwan Kao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF OPTIMIZING LITHOGRAPHY TOOLS UTILIZATION
Publication number
20140078478
Publication date
Mar 20, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Yao-Hwan Kao
H01 - BASIC ELECTRIC ELEMENTS