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Steven Ly
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San Jose, CA, US
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last 30 patents
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Patent Application
Process and system for heating semiconductor substrates in a proces...
Publication number
20060032848
Publication date
Feb 16, 2006
Young Jai Lee
C30 - CRYSTAL GROWTH
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Patent Application
Process and system for heating semiconductor substrates in a proces...
Publication number
20030209326
Publication date
Nov 13, 2003
Mattson Technology, Inc.
Young Jai Lee
C30 - CRYSTAL GROWTH