Steven M. Bilodeau

Person

Oxford, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compositions and methods for selectively etching silicon nitride films
- Patent number 12,012,540
- Issue date Jun 18, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Formulations to selectively etch silicon-germanium relative to silicon
- Patent number 11,875,997
- Issue date Jan 16, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Wet etching composition and method
- Patent number 11,781,066
- Issue date Oct 10, 2023
- Entegris, Inc.
- YoungMin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon nitride etching composition and method
- Patent number 11,697,767
- Issue date Jul 11, 2023
- Entegris, Inc.
- Steven Michael Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Compositions and methods for selectively etching silicon nitride films
- Patent number 11,530,356
- Issue date Dec 20, 2022
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etching composition and method
- Patent number 11,365,351
- Issue date Jun 21, 2022
- Entegris, Inc.
- YoungMin Kim
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Silicon nitride etching composition and method
- Patent number 11,053,440
- Issue date Jul 6, 2021
- Entegris, Inc.
- Steven M. Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Composition and process for selectively etching p-doped polysilicon...
- Patent number 10,991,809
- Issue date Apr 27, 2021
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formulations to selectively etch silicon germanium relative to germ...
- Patent number 10,957,547
- Issue date Mar 23, 2021
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for etching silicon nitride-containing sub...
- Patent number 10,651,045
- Issue date May 12, 2020
- Entegris, Inc.
- Emanuel Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formulations to selectively etch silicon and germanium
- Patent number 10,475,658
- Issue date Nov 12, 2019
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of non-oxidizing strong acids for the removal of ion-implanted...
- Patent number 10,347,504
- Issue date Jul 9, 2019
- Entegris, Inc.
- Steven Bilodeau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ni:NiGe:Ge selective etch formulations and method of using same
- Patent number 10,340,150
- Issue date Jul 2, 2019
- Entegris, Inc.
- Steven Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Passivation of germanium surfaces
- Patent number 10,290,505
- Issue date May 14, 2019
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors for silicon dioxide gap fill
- Patent number 10,043,658
- Issue date Aug 7, 2018
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors for silicon dioxide gap fill
- Patent number 9,337,054
- Issue date May 10, 2016
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component for solar adsorption refrigeration system and method of m...
- Patent number 9,132,412
- Issue date Sep 15, 2015
- Entegris, Inc.
- J. Donald Carruthers
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Lithographic tool in situ clean formulations
- Patent number 9,074,169
- Issue date Jul 7, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Component for solar adsorption refrigeration system and method of m...
- Patent number 8,539,781
- Issue date Sep 24, 2013
- Advanced Technology Materials, Inc.
- J. Donald Carruthers
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical vapor deposition of high conductivity, adherent thin films...
- Patent number 8,241,704
- Issue date Aug 14, 2012
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Super-dry reagent compositions for formation of ultra low k films
- Patent number 8,053,375
- Issue date Nov 8, 2011
- Advanced Technology Materials, Inc.
- Chongying Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of high conductivity, adherent thin films...
- Patent number 8,034,407
- Issue date Oct 11, 2011
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scalable lead zirconium titanate (PZT) thin film material and depos...
- Patent number 7,862,857
- Issue date Jan 4, 2011
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Scalable lead zirconium titanate (PZT) thin film material and depos...
- Patent number 7,705,382
- Issue date Apr 27, 2010
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scalable lead zirconium titanate (PZT) thin film material and depos...
- Patent number 7,344,589
- Issue date Mar 18, 2008
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of high conductivity, adherent thin films...
- Patent number 7,285,308
- Issue date Oct 23, 2007
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ethyleneoxide-silane and bridged silane precursors for forming low...
- Patent number 7,022,864
- Issue date Apr 4, 2006
- Advanced Technology Materials, Inc.
- Alexander S. Borovik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidative top electrode deposition process, and microelectronic dev...
- Patent number 7,012,292
- Issue date Mar 14, 2006
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scalable lead zirconium titanate (PZT) thin film material and depos...
- Patent number 6,984,417
- Issue date Jan 10, 2006
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, B...
- Patent number 6,692,569
- Issue date Feb 17, 2004
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHANT COMPOSITIONS AND RELATED METHODS
- Publication number 20240150653
- Publication date May 9, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON-GERMANIUM RELATIVE TO SILICON
- Publication number 20240096635
- Publication date Mar 21, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING POLYSILICON
- Publication number 20230407176
- Publication date Dec 21, 2023
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE ETCHING COMPOSITIONS AND METHOD
- Publication number 20230365863
- Publication date Nov 16, 2023
- Entegris, Inc.
- Steven M. Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
- Publication number 20230295502
- Publication date Sep 21, 2023
- Entegris, Inc.
- Steven Michael BILODEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS
- Publication number 20220389314
- Publication date Dec 8, 2022
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET ETCHING COMPOSITION AND METHOD
- Publication number 20220275276
- Publication date Sep 1, 2022
- Entegris, Inc.
- YoungMin KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS
- Publication number 20220033710
- Publication date Feb 3, 2022
- Entegris, Inc.
- Steven M. BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
- Publication number 20210296136
- Publication date Sep 23, 2021
- Entegris, Inc.
- Steven Michael BILODEAU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
WET ETCHING COMPOSITION AND METHOD
- Publication number 20210108140
- Publication date Apr 15, 2021
- Entegris, Inc.
- YoungMin KIM
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SILICON NITRIDE ETCHING COMPOSITION AND METHOD
- Publication number 20200157423
- Publication date May 21, 2020
- Entegris, Inc.
- Steven M. BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS AND METHODS FOR ETCHING SILICON NITRIDE-CONTAINING SUB...
- Publication number 20190074188
- Publication date Mar 7, 2019
- Entegris, Inc.
- Emanuel Cooper
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Composition and Process for Selectively Etching P-Doped Polysilicon...
- Publication number 20180337253
- Publication date Nov 22, 2018
- Entegris, Inc.
- Steven Bilodeau
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON-GERMANIUM RELATIVE TO SILICON
- Publication number 20180294165
- Publication date Oct 11, 2018
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVATION OF GERMANIUM SURFACES
- Publication number 20180240674
- Publication date Aug 23, 2018
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20180240680
- Publication date Aug 23, 2018
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON GERMANIUM RELATIVE TO GERM...
- Publication number 20180197746
- Publication date Jul 12, 2018
- Entegris, Inc.
- Steven Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECURSORS FOR SILICON DIOXIDE GAP FILL
- Publication number 20180130654
- Publication date May 10, 2018
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON AND GERMANIUM
- Publication number 20160343576
- Publication date Nov 24, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...
- Publication number 20160322232
- Publication date Nov 3, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NI:NIGE:GE SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME
- Publication number 20160314990
- Publication date Oct 27, 2016
- Entegris, Inc.
- Steven BILODEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECURSORS FOR SILICON DIOXIDE GAP FILL
- Publication number 20160225615
- Publication date Aug 4, 2016
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION
- Publication number 20150162213
- Publication date Jun 11, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-K PEROVSKITE MATERIALS AND METHODS OF MAKING AND USING THE SAME
- Publication number 20140134823
- Publication date May 15, 2014
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR SOLAR ADSORPTION REFRIGERATION SYSTEM AND METHOD OF M...
- Publication number 20140020419
- Publication date Jan 23, 2014
- Advanced Technology Materials, Inc.
- J. Donald Carruthers
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOS...
- Publication number 20130324390
- Publication date Dec 5, 2013
- Advanced Technology Materials, Inc.
- Peter C. Van Buskirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES...
- Publication number 20130280123
- Publication date Oct 24, 2013
- Advanced Technology Materials, Inc.
- Tianniu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES
- Publication number 20120127629
- Publication date May 24, 2012
- Advanced Technology Materials, Inc.
- Jeffrey F. Roeder
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
LITHOGRAPHIC TOOL IN SITU CLEAN FORMULATIONS
- Publication number 20120015857
- Publication date Jan 19, 2012
- Advanced Technology Materials, Inc.
- Tianniu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHEMICAL VAPOR DEPOSITION OF HIGH CONDUCTIVITY, ADHERENT THIN FILMS...
- Publication number 20110195188
- Publication date Aug 11, 2011
- Advanced Technology Materials, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steven M. Bilodeau

Person

Patents Grantslast 30 patents

Compositions and methods for selectively etching silicon nitride films

Formulations to selectively etch silicon-germanium relative to silicon

Wet etching composition and method

Silicon nitride etching composition and method

Compositions and methods for selectively etching silicon nitride films

Wet etching composition and method

Silicon nitride etching composition and method

Composition and process for selectively etching p-doped polysilicon...

Formulations to selectively etch silicon germanium relative to germ...

Compositions and methods for etching silicon nitride-containing sub...

Formulations to selectively etch silicon and germanium

Use of non-oxidizing strong acids for the removal of ion-implanted...

Ni:NiGe:Ge selective etch formulations and method of using same

Passivation of germanium surfaces

Precursors for silicon dioxide gap fill

Precursors for silicon dioxide gap fill

Component for solar adsorption refrigeration system and method of m...

Lithographic tool in situ clean formulations

Component for solar adsorption refrigeration system and method of m...

Chemical vapor deposition of high conductivity, adherent thin films...

Super-dry reagent compositions for formation of ultra low k films

Chemical vapor deposition of high conductivity, adherent thin films...

Scalable lead zirconium titanate (PZT) thin film material and depos...

Scalable lead zirconium titanate (PZT) thin film material and depos...

Scalable lead zirconium titanate (PZT) thin film material and depos...

Chemical vapor deposition of high conductivity, adherent thin films...

Ethyleneoxide-silane and bridged silane precursors for forming low...

Oxidative top electrode deposition process, and microelectronic dev...

Scalable lead zirconium titanate (PZT) thin film material and depos...

A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, B...

Patents Applicationslast 30 patents

ETCHANT COMPOSITIONS AND RELATED METHODS

FORMULATIONS TO SELECTIVELY ETCH SILICON-GERMANIUM RELATIVE TO SILICON

METHOD FOR ETCHING POLYSILICON

SILICON NITRIDE ETCHING COMPOSITIONS AND METHOD

SILICON NITRIDE ETCHING COMPOSITION AND METHOD

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS

WET ETCHING COMPOSITION AND METHOD

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS

SILICON NITRIDE ETCHING COMPOSITION AND METHOD

WET ETCHING COMPOSITION AND METHOD

SILICON NITRIDE ETCHING COMPOSITION AND METHOD

COMPOSITIONS AND METHODS FOR ETCHING SILICON NITRIDE-CONTAINING SUB...

Composition and Process for Selectively Etching P-Doped Polysilicon...

FORMULATIONS TO SELECTIVELY ETCH SILICON-GERMANIUM RELATIVE TO SILICON

PASSIVATION OF GERMANIUM SURFACES

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

FORMULATIONS TO SELECTIVELY ETCH SILICON GERMANIUM RELATIVE TO GERM...

PRECURSORS FOR SILICON DIOXIDE GAP FILL

FORMULATIONS TO SELECTIVELY ETCH SILICON AND GERMANIUM

USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED...

NI:NIGE:GE SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME

PRECURSORS FOR SILICON DIOXIDE GAP FILL

FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION

HIGH-K PEROVSKITE MATERIALS AND METHODS OF MAKING AND USING THE SAME

COMPONENT FOR SOLAR ADSORPTION REFRIGERATION SYSTEM AND METHOD OF M...

SCALABLE LEAD ZIRCONIUM TITANATE (PZT) THIN FILM MATERIAL AND DEPOS...

METHOD FOR PREVENTING THE COLLAPSE OF HIGH ASPECT RATIO STRUCTURES...

DOPED ZrO2 CAPACITOR MATERIALS AND STRUCTURES

LITHOGRAPHIC TOOL IN SITU CLEAN FORMULATIONS

CHEMICAL VAPOR DEPOSITION OF HIGH CONDUCTIVITY, ADHERENT THIN FILMS...