Steven Marcus

Person

Tempe, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition of metal carbide films using aluminum hydro...
- Patent number 9,631,272
- Issue date Apr 25, 2017
- ASM America, Inc.
- Dong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced atomic layer deposition of conductive material over...
- Patent number 9,466,574
- Issue date Oct 11, 2016
- ASM America, Inc.
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced atomic layers deposition of conductive material ove...
- Patent number 8,557,702
- Issue date Oct 15, 2013
- ASM America, Inc.
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced deposition process for forming a metal oxide thin f...
- Patent number 8,383,525
- Issue date Feb 26, 2013
- ASM America, Inc.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming non-conformal layers
- Patent number 8,334,218
- Issue date Dec 18, 2012
- ASM America, Inc.
- Sebastian E. Van Nooten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced deposition of metal carbide films
- Patent number 8,268,409
- Issue date Sep 18, 2012
- ASM America, Inc.
- Kai-Erik Elers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced pulsed deposition of metal carbide films
- Patent number 7,666,474
- Issue date Feb 23, 2010
- ASM America, Inc.
- Dong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming non-conformal layers
- Patent number 7,608,549
- Issue date Oct 27, 2009
- ASM America, Inc.
- Sebastian E. Van Nooten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivated stoichiometric metal nitride films
- Patent number 7,595,270
- Issue date Sep 29, 2009
- ASM America, Inc.
- Kai-Erik Elers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon oxynitride film
- Patent number 6,303,520
- Issue date Oct 16, 2001
- Mattson Technology, Inc.
- Dim-Lee Kwong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of rapid thermal processing (RTP) of ion implanted silicon
- Patent number 6,077,751
- Issue date Jun 20, 2000
- Steag RTP Systems GmbH
- Steven D. Marcus
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
- Publication number 20140127405
- Publication date May 8, 2014
- ASM AMERICA, INC
- Dong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
- Publication number 20140008803
- Publication date Jan 9, 2014
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES
- Publication number 20120100308
- Publication date Apr 26, 2012
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
- Publication number 20100193955
- Publication date Aug 5, 2010
- ASM AMERICA, INC
- Robert B. Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING NON-CONFORMAL LAYERS
- Publication number 20100022099
- Publication date Jan 28, 2010
- ASM AMERICA, INC
- Sebastian E. Van Nooten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
- Publication number 20090315093
- Publication date Dec 24, 2009
- ASM AMERICA, INC
- Dong LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED PULSED DEPOSITION OF METAL CARBIDE FILMS
- Publication number 20090280267
- Publication date Nov 12, 2009
- ASM AMERICA, INC
- Dong Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION PROCESS FOR FORMING A METAL OXIDE THIN F...
- Publication number 20090269941
- Publication date Oct 29, 2009
- ASM AMERICA, INC
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PASSIVATED STOICHIOMETRIC METAL NITRIDE FILMS
- Publication number 20080182410
- Publication date Jul 31, 2008
- ASM AMERICA, INC
- Kai-Erik Elers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION OF METAL CARBIDE FILMS
- Publication number 20080113110
- Publication date May 15, 2008
- ASM AMERICA, INC
- Kai-Erik Elers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming non-conformal layers
- Publication number 20070026540
- Publication date Feb 1, 2007
- Sebastian E. van Nooten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Steven Marcus

Person

Patents Grantslast 30 patents

Atomic layer deposition of metal carbide films using aluminum hydro...

Plasma-enhanced atomic layer deposition of conductive material over...

Plasma-enhanced atomic layers deposition of conductive material ove...

Plasma-enhanced deposition process for forming a metal oxide thin f...

Method of forming non-conformal layers

Plasma-enhanced deposition of metal carbide films

Plasma-enhanced pulsed deposition of metal carbide films

Method of forming non-conformal layers

Passivated stoichiometric metal nitride films

Silicon oxynitride film

Method of rapid thermal processing (RTP) of ion implanted silicon

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...

TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES

PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...

METHOD OF FORMING NON-CONFORMAL LAYERS

ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...

PLASMA-ENHANCED PULSED DEPOSITION OF METAL CARBIDE FILMS

PLASMA-ENHANCED DEPOSITION PROCESS FOR FORMING A METAL OXIDE THIN F...

PASSIVATED STOICHIOMETRIC METAL NITRIDE FILMS

PLASMA-ENHANCED DEPOSITION OF METAL CARBIDE FILMS

Method of forming non-conformal layers