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Steven Marks
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Petaluma, CA, US
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last 30 patents
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Patent Grant
Cobalt silicide etch process and apparatus
Patent number
6,486,069
Issue date
Nov 26, 2002
Tegal Corporation
Steven Marks
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Cobalt silicide etch process and apparatus
Patent number
6,391,148
Issue date
May 21, 2002
Tegal Corporation
Steven Marks
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Cobalt silicide etch process and apparatus
Publication number
20010003676
Publication date
Jun 14, 2001
Tegal Corporation
Steven Marks
H01 - BASIC ELECTRIC ELEMENTS