Steven R. Lange

Person

Alamo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection systems and techniques with enhanced detection
- Patent number 10,126,251
- Issue date Nov 13, 2018
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Defect marking for semiconductor wafer inspection
- Patent number 10,082,470
- Issue date Sep 25, 2018
- KLA-Tencor Corporation
- David Shortt
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for determining defect depths in vertical sta...
- Patent number 9,696,264
- Issue date Jul 4, 2017
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting defects in vertical memory
- Patent number 9,612,209
- Issue date Apr 4, 2017
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Inspection systems and techniques with enhanced detection
- Patent number 9,599,573
- Issue date Mar 21, 2017
- KLA-Tencor Corporation
- Steven R. Lange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for imaging a sample with a laser sustained plasm...
- Patent number 9,558,858
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- David W. Shortt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus and methods for detecting defects in vertical memory
- Patent number 9,075,027
- Issue date Jul 7, 2015
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Multi-spectral defect inspection for 3D wafers
- Patent number 8,912,495
- Issue date Dec 16, 2014
- KLA-Tencor Corp.
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Optical defect amplification for improved sensitivity on patterned...
- Patent number 8,705,027
- Issue date Apr 22, 2014
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspection of a specimen using different in...
- Patent number 8,384,887
- Issue date Feb 26, 2013
- KLA-Tencor Technologies Corp.
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for inspection of a specimen using different in...
- Patent number 7,738,089
- Issue date Jun 15, 2010
- KLA-Tencor Technologies Corp.
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a substrate using a plurality o...
- Patent number 7,352,456
- Issue date Apr 1, 2008
- KLA-Tencor Technologies Corp.
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
All-reflective optical systems for broadband wafer inspection
- Patent number 7,351,980
- Issue date Apr 1, 2008
- KLA-Tencor Technologies Corp.
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Slit confocal autofocus system
- Patent number 7,142,315
- Issue date Nov 28, 2006
- KLA-Tencor Technologies Corporation
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Systems for inspecting wafers and reticles with increased resolution
- Patent number 7,130,037
- Issue date Oct 31, 2006
- KLA-Tencor Technologies Corp.
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Radiation damage reduction
- Patent number 7,031,796
- Issue date Apr 18, 2006
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Uniform pupil illumination for optical inspection systems
- Patent number 7,001,055
- Issue date Feb 21, 2006
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G02 - OPTICS
Information Patent Grant
Multi-detector microscopic inspection system
- Patent number 6,862,142
- Issue date Mar 1, 2005
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G02 - OPTICS
Information Patent Grant
System and method for inspecting semiconductor wafers
- Patent number 6,791,680
- Issue date Sep 14, 2004
- KLA-Tencor Corporation
- Eliezer Rosengaus
- G01 - MEASURING TESTING
Information Patent Grant
Inspection system with multiple illumination sources
- Patent number 6,788,404
- Issue date Sep 7, 2004
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection using optimized geometry
- Patent number 6,603,541
- Issue date Aug 5, 2003
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for reducing thin film color variation in opt...
- Patent number 6,570,650
- Issue date May 27, 2003
- KLA-Tenor Corporation
- Yu Guan
- G01 - MEASURING TESTING
Information Patent Grant
Lens for microscopic inspection
- Patent number 6,362,923
- Issue date Mar 26, 2002
- KLA Tencor
- Steve R. Lange
- G02 - OPTICS
Information Patent Grant
System and method for inspecting semiconductor wafers
- Patent number 6,020,957
- Issue date Feb 1, 2000
- KLA-Tencor Corporation
- Eliezer Rosengaus
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System and Method for X-Ray Imaging and Classification of Volume De...
- Publication number 20190003988
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Richard W. Solarz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Marking For Semiconductor Wafer Inspection
- Publication number 20180088056
- Publication date Mar 29, 2018
- KLA-Tencor Corporation
- David Shortt
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION
- Publication number 20170176346
- Publication date Jun 22, 2017
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICAT...
- Publication number 20170161418
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION
- Publication number 20160153914
- Publication date Jun 2, 2016
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING DEFECTS IN VERTICAL MEMORY
- Publication number 20150260660
- Publication date Sep 17, 2015
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spectral Defect Inspection for 3D Wafers
- Publication number 20150069241
- Publication date Mar 12, 2015
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Imaging a Sample with a Laser Sustained Plasm...
- Publication number 20150048741
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- David W. Shortt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING DEFECT DEPTHS IN VERTICAL STA...
- Publication number 20140300890
- Publication date Oct 9, 2014
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spectral Defect Inspection for 3D Wafers
- Publication number 20140139822
- Publication date May 22, 2014
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING DEFECTS IN VERTICAL MEMORY
- Publication number 20140139830
- Publication date May 22, 2014
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
Using Three-Dimensional Representations for Defect-Related Applicat...
- Publication number 20120316855
- Publication date Dec 13, 2012
- KLA-Tencor Corporation
- Allen Park
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL DEFECT AMPLIFICATION FOR IMPROVED SENSITIVITY ON PATTERNED...
- Publication number 20120113416
- Publication date May 10, 2012
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR INSPECTION OF A SPECIMEN USING DIFFERENT IN...
- Publication number 20100238433
- Publication date Sep 23, 2010
- KLA-Tencor Technologies Corporation
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Application
All-reflective optical systems for broadband wafer inspection
- Publication number 20060219930
- Publication date Oct 5, 2006
- Steven R. Lange
- G02 - OPTICS
Information Patent Application
Methods and systems for inspection of a specimen using different in...
- Publication number 20050052643
- Publication date Mar 10, 2005
- Steve R. Lange
- G01 - MEASURING TESTING
Information Patent Application
Radiation damage reduction
- Publication number 20050048678
- Publication date Mar 3, 2005
- Steven R. Lange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for inspecting a substrate using a plurality o...
- Publication number 20040201837
- Publication date Oct 14, 2004
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
Multi-detector microscopic inspection system
- Publication number 20040027688
- Publication date Feb 12, 2004
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G02 - OPTICS
Information Patent Application
Inspection system with multiple illumination sources
- Publication number 20040012774
- Publication date Jan 22, 2004
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR REDUCING THIN FILM COLOR VARIATION IN OPT...
- Publication number 20030086080
- Publication date May 8, 2003
- KLA-Tencor Corporation
- Yu Guan
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION USING OPTIMIZED GEOMETRY
- Publication number 20030086082
- Publication date May 8, 2003
- KLA-Tencor Technologies Corporation
- Steven R. Lange
- G01 - MEASURING TESTING

Steven R. Lange

Person

Patents Grantslast 30 patents

Inspection systems and techniques with enhanced detection

Defect marking for semiconductor wafer inspection

Apparatus and methods for determining defect depths in vertical sta...

Apparatus and methods for detecting defects in vertical memory

Inspection systems and techniques with enhanced detection

System and method for imaging a sample with a laser sustained plasm...

Apparatus and methods for detecting defects in vertical memory

Multi-spectral defect inspection for 3D wafers

Optical defect amplification for improved sensitivity on patterned...

Methods and systems for inspection of a specimen using different in...

Methods and systems for inspection of a specimen using different in...

Method and apparatus for inspecting a substrate using a plurality o...

All-reflective optical systems for broadband wafer inspection

Slit confocal autofocus system

Systems for inspecting wafers and reticles with increased resolution

Radiation damage reduction

Uniform pupil illumination for optical inspection systems

Multi-detector microscopic inspection system

System and method for inspecting semiconductor wafers

Inspection system with multiple illumination sources

Wafer inspection using optimized geometry

Apparatus and methods for reducing thin film color variation in opt...

Lens for microscopic inspection

System and method for inspecting semiconductor wafers

Patents Applicationslast 30 patents

System and Method for X-Ray Imaging and Classification of Volume De...

Defect Marking For Semiconductor Wafer Inspection

INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION

USING THREE-DIMENSIONAL REPRESENTATIONS FOR DEFECT-RELATED APPLICAT...

INSPECTION SYSTEMS AND TECHNIQUES WITH ENHANCED DETECTION

APPARATUS AND METHODS FOR DETECTING DEFECTS IN VERTICAL MEMORY

Multi-Spectral Defect Inspection for 3D Wafers

System and Method for Imaging a Sample with a Laser Sustained Plasm...

APPARATUS AND METHODS FOR DETERMINING DEFECT DEPTHS IN VERTICAL STA...

Multi-Spectral Defect Inspection for 3D Wafers

APPARATUS AND METHODS FOR DETECTING DEFECTS IN VERTICAL MEMORY

Using Three-Dimensional Representations for Defect-Related Applicat...

OPTICAL DEFECT AMPLIFICATION FOR IMPROVED SENSITIVITY ON PATTERNED...

METHODS AND SYSTEMS FOR INSPECTION OF A SPECIMEN USING DIFFERENT IN...

All-reflective optical systems for broadband wafer inspection

Methods and systems for inspection of a specimen using different in...

Radiation damage reduction

Method and apparatus for inspecting a substrate using a plurality o...

Multi-detector microscopic inspection system

Inspection system with multiple illumination sources

APPARATUS AND METHODS FOR REDUCING THIN FILM COLOR VARIATION IN OPT...

WAFER INSPECTION USING OPTIMIZED GEOMETRY