Steven R. WALTHER

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Wafer temperature measurement in an ion implantation system
- Patent number 11,942,343
- Issue date Mar 26, 2024
- Advanced Ion Beam Technology, Inc.
- Chien-Li Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WAFER TEMPERATURE MEASUREMENT IN AN ION IMPLANTATION SYSTEM
- Publication number 20230054419
- Publication date Feb 23, 2023
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Chien-Li CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TEMPERATURE MEASUREMENT IN AN ION IMPLANTATION SYSTEM
- Publication number 20210242054
- Publication date Aug 5, 2021
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Chien-Li CHEN
- H01 - BASIC ELECTRIC ELEMENTS