Steven Sergi

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Woodbury, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Carbon dopant gas and co-flow for implant beam and source life perf...
- Patent number 10,354,877
- Issue date Jul 16, 2019
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon dopant gas and co-flow for implant beam and source life perf...
- Patent number 9,960,042
- Issue date May 1, 2018
- Entegris Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERF...
- Publication number 20180211839
- Publication date Jul 26, 2018
- Entegris, Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERF...
- Publication number 20160020102
- Publication date Jan 21, 2016
- Entegris Inc.
- Oleg Byl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION TOOL CLEANING APPARATUS AND METHOD
- Publication number 20120111374
- Publication date May 10, 2012
- Advanced Technology Materials, Inc.
- Joseph R. Despres
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20110259366
- Publication date Oct 27, 2011
- Advanced Technology Materials, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...