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Steven Sherman
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Lexington, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Detection and mitigation of particle contaminants in MEMS devices
Patent number
8,598,891
Issue date
Dec 3, 2013
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Detection and mitigation of particle contaminants in MEMS devices
Patent number
8,421,481
Issue date
Apr 16, 2013
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic micromechanical apparatus with suspended microstructure
Patent number
6,192,757
Issue date
Feb 27, 2001
Analog Devices, Inc.
Robert W. K. Tsang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic micromechanical apparatus with suspended microstructure
Patent number
6,009,753
Issue date
Jan 4, 2000
Analog Devices, Inc.
Robert W. K. Tsang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Conductive plane beneath suspended microstructure
Patent number
5,858,809
Issue date
Jan 12, 1999
Analog Devices
Kevin Hin-Leung Chau
G01 - MEASURING TESTING
Information
Patent Grant
Monolithic micromechanical apparatus with suspended microstructure
Patent number
5,847,280
Issue date
Dec 8, 1998
Analog Devices, Inc.
Steven J. Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Conductive plane beneath suspended microstructure
Patent number
5,640,039
Issue date
Jun 17, 1997
Analog Devices, Inc.
Kevin Hin-Leung Chau
G01 - MEASURING TESTING
Information
Patent Grant
Monolithic accelerometer
Patent number
5,540,095
Issue date
Jul 30, 1996
Analog Devices, Inc.
Steven J. Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for adjusting sensitivity of a sensor
Patent number
5,465,604
Issue date
Nov 14, 1995
Analog Devices, Inc.
Steven J. Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic chip containing integrated circuitry and suspended micro...
Patent number
5,417,111
Issue date
May 23, 1995
Analog Devices, Inc.
Steven J. Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic accelerometer
Patent number
5,345,824
Issue date
Sep 13, 1994
Analog Devices, Inc.
Steven J. Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Detection and Mitigation of Particle Contaminants in MEMS Devices
Publication number
20130168675
Publication date
Jul 4, 2013
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Detection and Mitigation of Particle Contaminants in MEMS Devices
Publication number
20110115498
Publication date
May 19, 2011
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sense interface system with velocity feed-through rejection
Publication number
20030098699
Publication date
May 29, 2003
Mark A. Lemkin
G01 - MEASURING TESTING