Steven Shyng-Tsong T. Chen

Person

  • Patterson, NY, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    MAINTAINING UNIFORM CMP HARD MASK THICKNESS

    • Publication number 20060043590
    • Publication date Mar 2, 2006
    • International Business Machines Corporation
    • Steven Shyng-Tsong T. Chen
    • H01 - BASIC ELECTRIC ELEMENTS